| Feature |
Benefit |
| >1 nA current in a 2 Å probe |
Rapid atomic-resolution Electron Energy Loss Spectroscopy (EELS) elemental mapping |
0.8 Å high angle annular dark field (HAADF) resolution |
Resolve fine spacings and single atoms |
| Correction of all fifth-order axial aberrations |
Larger probe angles, higher beam current |
| Every operation can be performed remotely |
Remote operation with no local assistance |
| Friction-free, centro-symmetric sample stage |
Ultra-precise sample motion, freedom from drift |
| Double tilt sample holder using ball bearings |
Backlash-free, ultra-precise tilting |
| Fast electrostatic beam blanker |
Avoids sample damage when not collecting data |
| 5th-order-corrected EELS optics |
>50 mr acceptance semi-angles, more efficient analysis |
| Microscope column is entirely ion-pumped |
Minimizes sample contamination and etching |
| Column uses only metal vacuum seals |
Sample vacuum typically <1x10-9 torr |
| Whole column bakeable to 140°C |
Eliminates microscope-caused contamination |
| Double μ-metal shielding of entire column |
Minimizes sensitivity to stray AC fields |
| Completely modular construction |
Customization of the microscope column is possible |
| Self-diagnosing electronics |
Rapid remote servicing |