fp-III
High-Speed and Precision Mask Repair Capability
The fp-III® Femto-Pulse Laser System is the newest addition to Bruker’s highly successful family of Photomask repair tools. With its extraordinary high-speed and precision mask repair capability, the fp-III is today’s most cost effective solution to replace obsolete, older, slower and less capable existing laser and FIB mask repair systems. The fp-III is designed for volume production mask repairs down to the 45nm technology node, including large and small area image reconstruction and through pellicle repairs.
Ultimate Control of Mask Repair Made Easy
Our Fempto-Pulse laser repair processes are fully controllable by shape, power, and number of pulses; independent of material composition, material interfaces or the geometry being removed.
Additionally, the integrated local pattern copy functions are standard on the system for easy setup and repeatable results.
Designed for Best Performance
The fp-III comes standard with both reflected and transission imaging to provide the best possible AIMS transmission performance.
Offering superior through-pellicle repair and particle removal capability of persistent unknown particle contamination, even over large areas.
Lots of Capability with None of the Worries
Bruker's mask repair fp-III delivers production-proven, high-speed repairs with:
- no vacuum requirement
- no chemistries
- no chemical residues
- no beam related charging effects
- no need for constant drift correction using undesirable positioning markers
How Can We Help?
Service and Application Support to Optimize Tool Utilization
The decision to invest in high-performance metrology is based on more than instrument performance and price. Bruker is committed to keeping your tool running at the peak of up-time and productivity. We have a highly educated worldwide team of service and support personnel that takes great pride in first-time solution of issues. Our variety of service coverage programs can be customized to match your specific requirements, including optimization of tool performance, recipe writing, and in-person technical support visits.
Bruker tailors services to your needs:
- Priority technical support
- Advance replacement parts and assemblies stored in regional warehouses for rapid response times
- Application and training services