X-Ray Metrology for Compound Semiconductor

RADS Software

Fast and accurate HRXRD analysis of epilayers


Bruker Rocking-curve Analysis by Dynamical Simulation (RADS) is the most trusted software in the industry to simulate and analyze high-resolution X-ray diffraction (HRXRD) data from epitaxial thin-film structures on single crystal substrates. It is the software-of-choice for professionals in R&D, production, and academia who perform detailed analyses of both simple and complex structures.

By automatically calculating process parameters, and immediately processing feedback to production, RADS software is designed from the ground up to improve process and yield results. This exclusive combination of features has allowed RADS to be the leading process monitoring and analysis software since 1991.

Automated, Reliable Evaluation of Materials

RADS is an auto-simulation software that uses first-principles theory and data-fitting technology to determine key materials parameters automatically and reliably within seconds. RADS follows a two-step process:

  1. Model entry—The user builds the nominal structure and parameters with a spreadsheet-style model and adds parameter bounds.
  2. Fitting process—An iterative fitting process, which can be optimized based on data type, is used to minimize the error function (a numeric value that describes the difference between the measured and simulated data). RADS uses a Differential Evolution genetic algorithm to evaluate the final solution.

Simulations are performed in seconds and can be automated as part of the measurement process on Bruker’s X-ray metrology systems.

Streamlined, Easy-to-Use Processes

The RADS software is designed for ease of use:

  • Layer parameter linking simplifies the analysis of complex multi-layer structures and allows for graded profiles.
  • An extensive built-in, user-customizable materials database is available for faster model creation.
  • Batch processing of multiple datasets can be automated to eliminate repetitive tasks.

Extensive Compatibility

RADS accommodates a wide range of materials, structures, and instrument conditions, with support for: 

  • Bulk and bonded single crystal substrates
  • Epitaxy modeling on 001/non-001 cubic materials and basal plane (c-plane) oriented hexagonal materials
  • Simulation of realistic instrumental conditions
  • A variety of data file formats