Scanning Microwave Impedance Microscopy (sMIM) uses a microwave signal that is reflected from the tip-sample interface to elucidate the electrodynamic properties of the sample surface underneath the tip apex. Detecting and processing the reflectance in real-time allows sMIM to directly access the permittivity and conductivity of the material. The near-field nature of sMIM, together with specialized AFM probes, delivers sub-aF sensitivity and allows routine electrical mapping with <30nm lateral resolution.
Bruker enhanced sMIM capabilities even further with the development of PeakForce sMIM and DataCube sMIM modes. These advanced sMIM modes provide simultaneous measurement of local variations in permittivity (ε) and conductivity (σ) for all types of materials relevant to nanoelectrical devices — including semiconductors, dielectrics, metals, metal oxides, buried structures, ferroelectrics, 1D and 2D materials, etc.
PeakForce sMIM couples sMIM with Bruker’s PeakForce Tapping® technology to greatly expand its application to previously challenging samples (e.g., carbon nanotubes, nanoparticle oxide films, and semiconductor devices) and provides simultaneous mapping of correlated nanomechanical properties.
PeakForce sMIM mode:
Bruker’s DataCube Modes extend the capabilities of sMIM to acquire multidimensional datasets.
DataCube sMIM mode:
PrimeNano Inc. (the developer of sMIM) has now introduced ScanWave Pro Solutions for high-resolution quantitative carrier profiling of doped semiconductors, which