Cryogenic CO₂ Cleaning

Extremely fast and environmentally friendly, Bruker's dry cryogenic CO2 cleaning technology offers unique advantages over conventional cleaning techniques. The Bruker technology is cost effective, non-destructive, waste and residue free, and eliminates corrosion and staining. With over 100 tools installed, Bruker provides Cryogenic CO2 process equipment for a broad range of applications across most semiconductor market segments.

Why Consider Cryogenic Cleaning

Our customers benefit from many inherent aspects of the technology and the perfected, patented features of Bruker's equipment. Our cryo dry cleaning systems deliver on a low cost of ownership with:

  • Superior cleaning performance using our patented nozzle design
  • Proven 24/7 production performance for high-demand applications
  • High throughputs ensuring high capital utilization
  • Compact system design requiring minimal cleanroom space 
  • Yield improvements not seen with standard wet or plasma cleaning processes

Bruker's Commitment

As the leading innovator of dry CO2 technology, Bruker sets the standard for quality dry process cleaning. The company currently holds over 25 U.S. and International patents in many areas of cryogenic CO2 cleaning. This innovation has been the standard in production cryogenic CO2 cleaning for over 30 years.

Our state of the art applications lab in Delray Beach, FL provides a location where our global customer base can come to develop new cleaning techniques or optimize their existing processes. 

To learn more about how Cryogenic CO2 cleaning technology can resolve your most difficult contamination problems, please contact us for more information or schedule a demonstration.


How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

Contact Us

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