SI BrickScan

SiBrickScan (SBS) is a dedicated at-line system for the FTIR quantification of interstitial Oxygen in complete Silicon ingots, resulting in a concentration profile along the longitudinal axis. Accessing this information without sawing wafers or test samples is a major and cost saving advantage.

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Get Valuable Information to Check and Optimize Product Quality

Knowing the Oxygen gradient of Si ingots enables important conclusions helping e.g. to control and optimize the Silicon crystallization process or to identify batches of bad raw material. Therefore SBS will help to save costs by optimizing product quality and reducing the amount of defective wafers. The random sampling of individual ingots does strongly reduce sample preparation efforts and provides relevant information much earlier.

Highest Sensitivity by State-of-the-Art FTIR Spectroscopy

Interstitial Oxygen quantification by FTIR spectroscopy (ASTM/SEMI 1188) is a well-known and important analysis method, but limited to thin Si samples in the low mm range. SiBrickScan (SBS) overcomes this limitation and is the first commercially available completely dedicated system to determine the Oxygen gradient in complete ingots along their major axis without the need of time-consuming and destructive thin sample preparation. SBS makes smart use of a related infrared overtone absorption band combined with reliable and state-of-the-art Bruker FTIR technology.

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Dedicated SBS Versions for Different Ingot Types

SBS is available for poly or mono crystalline standard square PV ingots (cross section ~156 x 156 mm2) as well as for cylindric Si ingots e.g. with ~150 mm (6") or ~200 mm (8") diameter. Systems for other diameters & shapes might be available on request.

Industry Compatible and Robust Design

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A robust and precise linear drive automatically controls the ingot measurement position: depending on configuration and ingot type a spatial Oxygen resolution of ~12 mm can be achieved along the ingot axis. Reliable and safe interlock mechanisms exclude the risk that the operator comes into contact with moving parts.

Intuitive and Easy to Use Software Interface

SiBrickScan (SBS) includes a dedicated and intuitive graphical user interface optimized for the industrial environment. Also by normal production workers the standard operation procedure can be learned within minutes: simply load the ingot, choose the desired analysis recipe and start the measurement. The measurement itself will then be conducted automatically, including data evaluation.

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Innovative high sensitivity beam path with included reference sample

A unique and innovative infrared beam path ensures highest measurement sensitivity. A high quality reference sample is already included in the instrument and the reference measurement is done automatically.

Detector options according to customer requirements

SBS is either available with a Stirling cooled detector, operating independently from liquid Nitrogen. Optionally SiBrickScan can also be ordered with liquid Nitrogen cooled detector, including an automatic refill device.

Quantification of Interstitial Oxygen without preparation of thin samples

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SiBrickScan allows for the analysis of interstitial Oxygen in Silicon ingots up to 500 mm length. This valuable information enables the optimization of the crystallization process as well as the qualification of individual ingots before sawing.

High Quality Calibration Directly Linked to ASTM/SEMI 1188

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SBS Oxygen evaluation uses a calibration which is directly linked to/derived from ASTM/SEMI 1188. Since the correlation of both methods is almost perfect, the interstitial Oxygen concentration is evaluated with highest accuracy.

Highest Detection Sensitivity with SBS

Depending on sample shape and properties (e.g. resistance) SBS can achieve interstitial Oxygen detection limits < 2ppma (< 1017/cm3). If you are interested in feasibility test measurements, please contact your local Bruker representative.