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Semiconductor Solutions

X-Ray Metrology for Compound Semiconductor

Providing X-ray metrology tools for both QC monitoring of epi-layer films and for detailed R&D analysis of a wide range of semiconductor films and wafers.
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Learn About Our Solutions for Semiconductor Manufacturing

X-Ray Metrology for Compound Semiconductor

Bruker provides X-ray metrology tools for both QC monitoring of epilayer films and for detailed R&D analysis of a wide range of semiconductor films and wafers. We offer systems designed specifically for the challenging demands of the production environment, as well as multi-application research tools for development supporting current and future metrology needs.

Find the Best X-Ray Metrology System for You

NEW QCVelox-HR

Fully automated system for high-throughput, precision HRXRD and XRR metrology of complex epilayer structures
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NEW QC5-R

Manual loading system for precision HRXRD and XRR metrology of complex epilayer structures
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Delta-X

Delta-X

Latest generation of X-ray metrology system for semiconductor thin film analysis
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QC3

QC3

High-resolution X-ray diffraction system for epilayers
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QCVELOX-E

QCVelox-E

Optimum HRXRD performance for epilayer monitoring
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Browse Our X-Ray Metrology for Compound Semiconductor Library

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Software

Make Sense of the Data

RADS Software for Xray data analysis

RADS Software

The most trusted software in the industry to simulate and analyze high-resolution X-ray diffraction data
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Support

How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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