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Dimension FastScan Pro
Multimode8-HR image

Automated Semiconductor

FastScan Pro Wafer v1


Bare wafer roughness metrology and defect review characterization


Sub 10-nanometer node electrical device characterization and fault isolation


Accurate step height and depth metrology measurements

 

HBLED and Solar

Dimension FastScan Pro LED v1

Automated HB-LED pattern sapphire (PSS) depth and shape metrology

Precise HB-LED substrate roughness

Electrical characterization of HB-LED and solar materials

Data Storage

FastScan Pro Data Storage v1
Most precise, highest resolution and high throughput, production-based slider metrology

Media substrate roughness and defect review characterization with outstanding resolution

Electrical and magnetic failure analysis characterization for wafer, media, and slider

Polymers and Thin Films

FastScan Pro Polymers and THins Films v1

High-throughput, topography measurements for quality control

Simultaneous topography and mechanical property mapping

Suitable for a wide range of block co-polymers

MEMS Manufacturing

FastScan Pro MEMS v1
Automated measurement of roughness, height, and shape


Mechanical property characterization (displacement, strain) of actuators

Electrical characterization of MEMS devices