Dektak XTL Automation
Dektak XTL bannerv v1

Analyzes large samples

  • Encoded 300mm X/Y stage
  • Accommodates 200 & 300mm wafers
  • Up to 350mm x 350mm panels

Industrial design

  • Integrated isolation platform
  • Incorporated keyboard/monitor
  • Small footprint workstation

Optimized features for QA/QC

  • Pattern recognition
  • Advanced production interface
  • Interlocked doors
  • Localized GUI
  • Auto-ready kit for SECS/GEM