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Coating Analysis

The special challenge in analyzing the samples discussed here is that both layer (aluminum) and substrate (silicon) are light elements, which requires measurement under vacuum, because otherwise the air in the beam path between sample and detector would absorb the low energy radiation emitted by the sample. Additionally, this application compares manual and automatic analysis using Auto-Point. Results show that layer thickness can be accurately determined with Micro-XRF, which is confirmed by comparison with direct measurement results on a layer fracture edge in the scanning electron microscope.

Download the full lab report XRF 457 (PDF)

Learn more about layer analysis with Micro-XRF