White Light Interferometry

InSight WLI

Automated, Gage-Capable Metrology for R&D and Production

InSight WLI with 300mm Wafer Handler

The fully automated InSight WLI system offers unmatched optical surface measurement capabilities with wafer-handler integration. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, the InSight WLI incorporates Bruker's patented tip/tilt head, a proprietary self-calibrating laser reference, integrated pattern recognition, and a host of other Bruker-exclusive interferometry innovations. No other metrology system provides the non-contact accuracy, throughput, and operator convenience for such a vast range of production metrology and imaging applications.


Benchmark for Accuracy and Robustness

  • Unique metrology sensor design with patented dual-LED light source
  • Self-calibrating, metrology optimizing laser reference
  • Integrated vibration-isolation floor-mount cabinet

Measurements & Analysis

Fastest, Easiest Nanometer-Scale Measurements

  • Fully automated measurement capabilities
  • Industry leading gage on nanometer-scaled features


Most Powerful Measurement and Analysis

  • Streamlined, customizable production interface
  • Flexible recipe and automation measurement optimization
  • Extensive library of filters and customizable analysis options

Configurations for Demanding Requirements

Configurations for Demanding Advanced Packaging

  • Complete die flatness and CMP metrology solution
  • TSV and interconnect measurements
  • Hot-spot and defect detection on full reticle die


Factory Automation Ready

  • S2/S8 Compliant
  • FDC, DCOL available


How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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