High-Speed Mapping Using Micro-XRF on SEM

Micro-XRF analysis on a Scanning Electron Microscope (SEM) is a unique and efficient analytical solution to augment the elemental and phase information of your specimen. Compared to traditional electron beam analysis, micro-XRF offers lower detection limits (ppm levels), higher energy X-ray line excitation and a larger information depth that opens new possibilities for SEM users looking for a more complete specimen characterization.

The XTrace can be mounted on an available SEM port and can focus X-rays to a spot size of less than 30 µm using modern X-ray polycapillary optics. The small spot not only allows the analysis of small sample areas but also the examination of element distributions. Since the X-ray beam that interacts with the sample is in a fixed spatial position, micro-XRF elemental mapping must be acquired via stage movement. However, a limiting feature of incorporating the benefits of micro-XRF analysis is that SEM stages are not designed for high speed movement.

Consequently, combining the XTrace with the new Rapid Stage is advantageous. This high-speed stage is mounted on top of the SEM stage, moves with a constant user-defined speed and is designed to be operated in conjunction with the micro-XRF source to acquire the desired information over large areas at an impressive speed.

During this webinar we will present examples from a wide range of application fields for the Rapid Stage, including petrological, environmental, geological and archaeological samples. We will conclude with a 15-minute Q&A session where our experts will answer your questions.

Who Should Attend?

  • Researchers in Geological Sciences and Mining
  • Scientists from analytic fields interested in the Micro-XRF for SEM technology
  • Everyone dealing with applications where a large overview of the sample is needed
Principle of XRF/SEM stage map
Mixed element map from an exotic Cu deposit in Chile


Stephan Boehm

Product Manager micro-XRF / SEM and WDS, Bruker Nano Analytics

Dr. Andrew Menzies

Senior Application Scientist Geology and Mining, Bruker Nano Analytics