QCVelox-E
System of choice for leading epi manufacturers
The essential tool for routine analysis of semiconductor substrates, epilayer structures and processed device wafers.
QCVELOX-E
The Bruker QCVelox-E is the system of choice for leading epi manufacturers to monitor their production lines. It is based on the industry standard QC3, with significant upgrades for throughput, reliability and ease of use. By using optimum X-ray source and optics technology, it couples high throughput with excellent repeatability to enable fast feedback of the layer quality and structure within a production environment.
Automated Operation
The QCVelox-E offers true automated operation, with straight-forward horizontal sample mounting, and fully automated alignment, measurements including full mapping without edge exclusion, and automated data analysis. An integrated barcode reader is fitted to aid productivity within a production environment.
An optional robot handler is available for automated loading and measurement from cassette, along with options for SECS-GEM and other factory host systems.
The QCVelox-E is the essential tool for routine analysis of semiconductor substrates, epilayer structures and processed device wafers for all compound semiconductor materials.
