X-Ray Metrology for Compound Semiconductors

QCVELOX-E

Optimum HRXRD performance for epilayer monitoring

System of choice for leading epi manufacturers

The essential tool for routine analysis of semiconductor substrates, epilayer structures and processed device wafers.

JV-QCVelox

Destaques

QCVELOX-E

The Bruker QCVelox-E is the system of choice for leading epi manufacturers to monitor their production lines. It is based on the industry standard QC3, with significant upgrades for throughput, reliability and ease of use. By using optimum X-ray source and optics technology, it couples high throughput with excellent repeatability to enable fast feedback of the layer quality and structure within a production environment.

Optimum X-ray
source and optics technology
True automated operation
for routine analysis of semiconductor substrates, epilayer structures and processed device wafers

Características

Features

Automated Operation

The QCVelox-E offers true automated operation, with straight-forward horizontal sample mounting, and fully automated alignment, measurements including full mapping without edge exclusion, and automated data analysis. An integrated barcode reader is fitted to aid productivity within a production environment.
 An optional robot handler is available for automated loading and measurement from cassette, along with options for SECS-GEM and other factory host systems.

The QCVelox-E is the essential tool for routine analysis of semiconductor substrates, epilayer structures and processed device wafers for all compound semiconductor materials.
 

Apoio

Support

How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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