Quantitative EDS Analysis at High Throughput

EDS spectra must provide reliable and accurate quantitative results. Due to an increasing demand for high analytical throughput and fast chemical mapping with PTS (position-tagged spectrometry), ultra-fast EDS processors are becoming essential. XFlash^® 7 sets a new standard for highest throughput with up to 1000 kcps. Here we demonstrate that EDS quantification is precise and reliable at any count rate, even 1000 kcps.

The new XFlash® 7 detector series allows for the detection and processing of X-ray signals at an unprecedented speed. The maintained spectrum quality enables the QUANTAX system to provide reliable quantification results.

These application examples show the quantification results of a binary compound (FeS₂, figure 1) and a stainless steel (figure 2) specimen using a standardless PhiRhoZ quantification method. Spectra were acquired at different electron beam currents, from 10 kcps up to 1000 kcps output count rate (OCR), and using different signal processing speeds. The results demonstrate that the level of accuracy is maintained up to very high count rates.

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Figure 1: Quantification results of stoichiometric FeS2 acquired at different pulse throughput rates, using standardless PhiRhoZ quantification method. S can be quantified with +/-1% relative (+/- 0.67% absolute) atomic % accuracy for up to 1000 kcps OCR. Fe can be quantified with +/-2% relative (+/- 1.33% absolute) atomic % accuracy

Fig. 2: Quantification results of a stainless steel sample acquired at different pulse throughput rates. Normalized weight percent, applying standardless PhiRhoZ quantification method. All major elements (Fe, Cr, Ni) can be quantified with +/-3.5% relative (+/- 0.7% absolute) accuracy for up to 1000 kcps OCR.