AFM 模式

隧穿原子力显微镜(TUNA)

对低导电率样品进行超低电流测量

8.5nm 厚的 SiO2 样品的形貌图（左）和隧穿电流图（右）。扫描尺寸 2μm，电流范围 200fA。

像导电原子力显微镜(C-AFM) 一样，隧穿原子力显微镜(TUNA) 可用于定位半导体或数据存储器件中的电学缺陷，或者研究导电聚合物、有机物或其他材料。

TUNA 的工作原理与 C-AFM 类似，但具有更高的电流灵敏度。TUNA 用于表征穿过薄膜厚度的超低电流(<1pA) ，对此类低导电率样品进行横向分辨率要求较高的电学表征时，这一特性尤为重要。

PeakForce TUNA™ 提供了布鲁克 TUNA 模块的超低电流检测功能，并与 PeakForce QNM® 的定量纳米力学成像功能相结合。

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