WaferScan
Advanced metrology system for automated wafer geometry characterization
Highlights
WaferScan Chromatic Confocal Spectroscopy
The WaferScanTM automated metrology system delivers rapid and accurate wafer geometry characterization to enable wafer manufacturers to meet the demanding lithography and CMP requirements imposed by 1x nm design rules and beyond.
Incoming wafer flatness variation and subsequent process induced-shape changes can result in drastic reduction in final device performance and yield. WaferScan obtains high-throughput measurements of stress-induced wafer shape changes, shape-induced overlay, wafer thickness variation, and front-side and back-side topography to address these issues. Measurements can be performed on various substrates, including polished, epitaxial, and SOI wafers.
Highly accurate
chromatic confocal technique
Delivers precise and reliable information about incoming wafer flatness variation and subsequent process-induced shape changes.
Flexible
design and configuration
Enable measurement of a variety of substrates and supports the integration of optional performance-enhancing features.
Fast
automated system
Provides high-throughput measurements of multiple wafer geometry parameters.
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Eigenschaften
Measurement Capabilities
- Wafer bow and warp
- Stress-induced curvature
- Wafer thickness and flatness variation
- Front and back surface topography
- Wafer edge roll-off (ERO)
System Components
Standard:
- Chromatic confocal spectroscopy
- Automated Stage with Auto Focus
Optional:
- Cassette to cassette wafer handling
- FOUP and SMIF compatible
- SECS/GEM
Anwendungen
Typical Application Areas
Typical application areas include:
- Wafer manufacturing
Spezifikationen
Technical Specifications
| Wafer Thickness Range | 5 µm - 1.5 mm |
|---|---|
| Wafer Thickness Accuracy | ±1.0 µm |
| Wafer Thickness Precision | 0.1 μm |
| Thickness Resolution | 0.01 μm |
| Wafer Curvature Range | Up to 1.5 mm |
| Spectral Range | 400 nm - 1000 nm |
| Measurement Spot Size | 25 µm |
| Sample Size | 2 mm - 300 mm (150 mm standard) |
| Spectral Resolution | 0.3 nm |
| Light Source | Regulated halogen lamp (10,000 hrs lifetime) |
| Detector Type | 2048 pixel Sony linear CCD array |
| Automated Stage with Auto Focus | 300 mm (200 mm is standard) |
| Computer | Multi-core processor with Windows™ 10 Operating System |