One of Bruker’s QUANTAX EDS/EBSD system most appreciated feature is its advanced integration of the EBSD and EDS techniques. The excellent integration is available also for electron transparent samples and is especially powerful when combining the eFlash FS and the unique XFlash® FlatQUAD EDS detector. This combination provides unrivaled data quality, spatial resolution and high throughput. Especially when combined with the patented TKD sample holder and the newly released X-ray mask. In this application example, oxide dispersion-strengthened ferritic alloy demonstrates the need for simulatenous TKD and EDS measurement with the XFlash® FlatQUAD to perform phase identification as well as distinction of crystallographically similar phases.