X-Ray Defect Inspection

QC-RT

Identify defects in high value substrates

X-ray diffraction imaging (XRDI) inspection system

QC-RT

The Bruker QC-RT is a defect metrology system using the latest X-ray diffraction imaging (XRDI) technology in reflection mode to identify defects in high value substrates, such as CdTe and other dense materials. Due to the nature of the X-ray diffraction, and unlike optical techniques, the wafer does not need to be etched or polished to be able to see the defects.

Non-destructive
wafer inspection
Identifies defect regions before optional high-resolution scans.
Optimized
camera resolution switching
Boosts performance and efficiency without manual intervention.
Customizable
automation
Enables reduction of user intervention from wafer handling through reporting.
Features

Tilts and Defects on CdTe Based Substrates

CdTe and CdHgTe are widely used for IR detection, particularly for night vision, and in thin film solar cells. For these applications, the quality of the grown crystals becomes important. The QC-RT is used for the quality control of such crystals, and for the further development of the processing of these substrates.

Support

How Can We Help?

Service and Application Support to Optimize Tool Utilization

The decision to invest in high-performance metrology is based on more than instrument performance and price. Bruker is committed to keeping your tool running at the peak of up-time and productivity. We have a highly educated worldwide team of service and support personnel that takes great pride in first-time solution of issues. Our variety of service coverage programs can be customized to match your specific requirements, including optimization of tool performance, recipe writing, and in-person technical support visits.

Bruker tailors services to your needs:

  • Priority technical support
  • Advance replacement parts and assemblies stored in regional warehouses for rapid response times
  • Application and training services

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