X-Ray Defect Inspection


Identify defects in high value substrates

X-ray diffraction imaging (XRDI) inspection system


The Bruker QC-RT is a defect metrology system using the latest X-ray diffraction imaging (XRDI) technology in reflection mode to identify defects in high value substrates, such as CdTe and other dense materials. Due to the nature of the X-ray diffraction, and unlike optical techniques, the wafer does not need to be etched or polished to be able to see the defects.

wafer inspection
Identifies defect regions before optional high-resolution scans.
camera resolution switching
Boosts performance and efficiency without manual intervention.
Enables reduction of user intervention from wafer handling through reporting.

Tilts and Defects on CdTe Based Substrates

CdTe and CdHgTe are widely used for IR detection, particularly for night vision, and in thin film solar cells. For these applications, the quality of the grown crystals becomes important. The QC-RT is used for the quality control of such crystals, and for the further development of the processing of these substrates.


How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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