QC-RT

布鲁克QC-RT采用先进的X射线衍射成像（XRDI）技术，在反射模式下精确检测诸如CdTe等高价值衬底及致密材料衬底中的潜在缺陷。与光学检测技术不同，得益于X射线衍射的本征特质，无需对晶圆进行蚀刻或抛光处理，即可清晰呈现晶圆内部的缺陷情况。为晶圆质控提供了更为高效、精准的无损检测解决方案。

无损的

晶圆检测技术

在切换到高清细检模式前，快速定位缺陷区域

优化的

不同分辨率相机的切换

无需人工干预，兼顾高性能和效率

定制化的

全自动流程

减少从上样至结果报告生成的人工干预

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Features

碲化镉（CdTe）衬底的取向变化和缺陷检测

在红外探测领域，尤其是夜视技术及薄膜太阳能电池中，CdTe和CdHgTe材料的应用极为广泛。为了确保这些应用的性能，生长出高质量的晶体结构显得尤为关键。布鲁克的QC-RT系统不仅为这类晶体提供精准的质量监控，还助力于改进这些材料的制造工艺，推动化合物半导体材料技术的进步与发展。

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