QC3
QC3
The QC3 is the long-established and well-proven QC system for epilayers. It is a high-resolution X-ray diffraction tool that is ideal for quality control. It is used for the measurement of composition and thickness in epitaxial layers of almost any material. The system uses standard sealed tube optics, combined with a variety of beam conditioning crystals that can be optimized to give the highest combination of resolution and intensity for each application.
Automated Operation
The QC3 offers true automated operation, with straight-forward horizontal sample mounting, and fully automated alignment, measurements, and data analysis. Data analysis can be performed automatically, or offline using our popular RADS software. The sample stage has a full 300mm of travel, allowing for measurements of large wafers, or several smaller wafers simultaneously. It is the traditional tool of choice for QC measurements within epilayer growth.
Powerful Software for Automated Analysis and Reporting
Leveraging extensive experience in semiconductor fabs, Bruker has developed robust and intuitive software suite for automated analysis and reporting, including:
- RADS for analysis of HRXRD data and reporting of composition, thickness, relaxation
- REFS for analysis of XRR data and reporting of thickness, density, roughness
- PeakFitting for FWHM and multi-peak fitting for reporting of barrier composition in complex structures
- PeakSplit for automated 2D fitting of reciprocal space maps and offline relaxation and tilt analysis
- QuickGraph for offline data display and basic analysis
Support
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.