QC3
QC3
The QC3 is the long-established and well-proven QC system for epilayers. It is a high-resolution X-ray diffraction tool that is ideal for quality control. It is used for the measurement of composition and thickness in epitaxial layers of almost any material. The system uses standard sealed tube optics, combined with a variety of beam conditioning crystals that can be optimized to give the highest combination of resolution and intensity for each application.
Automated Operation
The QC3 offers true automated operation, with straight-forward horizontal sample mounting, and fully automated alignment, measurements, and data analysis. Data analysis can be performed automatically, or offline using our popular RADS software. The sample stage has a full 300mm of travel, allowing for measurements of large wafers, or several smaller wafers simultaneously. It is the traditional tool of choice for QC measurements within epilayer growth.
强大的自动化分析与报告软件
QCVelox-HR配备布鲁克一整套成熟可靠的软件套组：
- RADS：用于HRXRD数据分析，并依设定可生成组分、厚度、弛豫度报告
- REFS：用于XRR数据分析，并依设定可生成厚度、密度、粗糙度报告
- PeakFitting：用于FWHM计算与多峰拟合，可分析复杂结构中器件层组分
- PeakSplit：用于倒易空间图谱的自动化二维拟合，支持离线弛豫度与倾斜度分析
- QuickGraph：离线数据分析与基础分析工具
Support
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.