AFM 模式

扫描电容显微镜（SCM）

高分辨率二维点剂剖析

将载波浓度映射到非一级掺杂的半导体样品，通常都依赖于二次离子质谱仪（SIMS）、扩散电阻分析（SRP）和一维电容电压（C-V）等工具。这些仪器生成一个维度的数据，需要推断定量的二维信息。

扫描电容显微镜（SCM）提供了一种直接测量激活载体浓度的方法，具有两个尺寸的纳米刻度精度。SCM 源自接触模式，使用极其敏感的高频谐振电路测量尖端和样品表面之间的电容变化。

除了 SCM 之外，布鲁克还为各种电气应用提供了多种纳米电特性模式。

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半导体表面的 SCM 图像，显示由 As+ 离子大量掺杂的区域。70μm 扫描大小。

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