硅基半导体的X射线量测方案

SIRIUS-FW

面向先进晶圆级封装的全自动微焦斑型X射线荧光(µXRF)量测平台 

助力良率提升的关键量测技术

Sirius-FW

Sirius - FW是第四代全自动微焦斑型X射线荧光(µXRF)量测平台,专为先进晶圆级封装生产而设计,提供专业的单凸块(single-bump)量测,精准监测银锡(SnAg)焊料凸块中的银(Ag)含量占比以及凸块下金属层的厚度,为控制凸块回流温度、确保凸块形状规则和良好键合提供关键支持。该平台技术成熟,久经实际产线验证,设备正常运行时间(uptime)可达 95% 以上。

Sirius - FW系统具备亚微米级的定位精度,能够精确测量直径小至10µm的单个焊料凸块,为生产提供高精度保障。其搭载的自动强度校正(automated intensity correction,AIC)功能,消除了漂移误差,确保量测的长期稳定性,让生产更加稳定可靠。作为一款量产级设备,Sirius-FW 采用Recipe驱动,全面支持晶圆厂自动化生产,提高量产效率。

特色的技术优化
垂直激发型微焦斑X射线荧光(µXRF)设计
专为大规模量产(HVM)的在线监控而设计的量测设备
<15 µm
为测量Ag Kα特征谱线而定制的微焦斑光源
对 Z 轴误差不敏感,提升量测的稳定性
>95%
设备的正常运行时间
第四代量产级平台,经实际产线的长期验证,性能可靠
Features

Key Features

  • 垂直激发型微焦斑X射线荧光(µXRF),专为大规模量产(HVM)的在线监控而设计的光路配置
  • 微焦斑(对Ag Kα特征谱线量测,可实现<15µm光斑尺寸)
  • 超低的Z轴误差敏感度
  • 边缘盲区<0.5mm
  • 无损检测方案,采用低功率密封式钨靶X射线管
  • 配备多毛细管型光束会聚及准直系统,支持多色激发
  • SDD探测器阵列,高效收集X射线光子
  • 四象限采集技术,降低了横向误差的影响 —— 这一点在测量圆顶形焊料凸块时尤为重要
  • 支持高弯曲度基板(最大弯曲度达 2mm)及玻璃基板检测

助力实现高良率

Sirius – FW对实现高良率至关重要,可测量: 

  • 银锡焊料中的银含量占比 —— 是控制凸块回流温度的关键,而稳定的回流温度是保证凸块形态规则及键合质量的前提
  • 焊料凸块高度、凸块下金属层(UBM)的厚度、背面凸块高度、重布线层(RDL)厚度及柱体高度(涉及铜、镍、金、钯、钛等材质)—— 是确保晶圆宏观平整度的关键,而良好的平整度是实现优质键合的基础

核心优势

  • 支持单凸块量测,精准测定工艺影响
  • 关键应用的测量可实现 GR&R的指标要求(测量系统分析),数据可靠性有保障
  • 具备量产级生产效率,具备优异的 MAM(移动 - 采集 - 测量)效率性能:金属厚度测量仅需数秒,银含量占比及凸块高度测量需 30-60 秒
  • 已通过主流封装厂验证(TOR),稳定性已经过实践检验,且多台设备间数据一致性高

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