Sirius - FW是第四代全自动微焦斑型X射线荧光(µXRF)量测平台,专为先进晶圆级封装生产而设计,提供专业的单凸块(single-bump)量测,精准监测银锡(SnAg)焊料凸块中的银(Ag)含量占比以及凸块下金属层的厚度,为控制凸块回流温度、确保凸块形状规则和良好键合提供关键支持。该平台技术成熟,久经实际产线验证,设备正常运行时间(uptime)可达 95% 以上。
Sirius - FW系统具备亚微米级的定位精度,能够精确测量直径小至10µm的单个焊料凸块,为生产提供高精度保障。其搭载的自动强度校正(automated intensity correction,AIC)功能,消除了漂移误差,确保量测的长期稳定性,让生产更加稳定可靠。作为一款量产级设备,Sirius-FW 采用Recipe驱动,全面支持晶圆厂自动化生产,提高量产效率。
Sirius – FW对实现高良率至关重要,可测量:
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