Semiconductor Solutions

Photomask Repair

Addressing the critical production issue of controlling pattern defects on high-end photomasks with the added challenges of decreasing feature sizes and increasing mask complexity.

Precise, Accurate Photomask Repair Solutions

Bruker's suite of mask repair equipment offers solutions for materials that provide significant challenges for the current industry standard repair techniques; specifically, quartz bumps on alternating phase shift masks, trimming of carbon patches, multi-level materials, foreign materials, persistent unknown particles and precision repairs within tight lines and spaces.


How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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