Electron Microscope Analyzers


Trace Element Sensitivity with Minimal Sample Preparation

High-Speed Elemental X-ray Mapping even over Large Areas

Film Thickness Analysis

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10 ppm
detection limit
Enabling trace element analysis due to the lower spectral background
4 mm/s
travel speed
The optional Rapid Stage enables high-speed mapping over large areas
1 nm - 40 µm
layer thickness range
Thin films starting from 1 nm up to multiple layer structures of 40 µm can be analyzed

Micro-XRF as a Complimentary Analytical Technique to EDS Analysis in the SEM

  • Micro-X-ray Fluorescence (Micro- XRF) spectroscopy analysis is a complementary non-destructive analytical technique to traditional Energy Dispersive Spectroscopy (EDS) analysis using a Scanning Electron Microscope (SEM). Such analyses are important for the characterization of the elemental composition within unknown samples ranging from large centimeter sized inhomogeneous specimens down to small micrometer particles.
  • X-ray excitation yields a much higher sensitivity for trace element detection (down to as low as 10 ppm for certain elements), an extended X-ray spectral range (up to 40 keV), as well as information from greater depth within the sample. 
  • Equipped with an X-ray tube in combination with a micro-focusing X-ray optic yields small spot sizes of 30 µm with high intensity throughput. 
  • A modular piezo-based stage, specially designed to mount on top of the existing SEM stage enables high-speed elemental X-ray mapping “on the fly” over large areas up to a speed of 4 mm/ sec. This enables the acquisition of X-ray mapping data over a sample size of 50 x 50 mm (or higher), incorporating light element spectral data as well as trace element and/ or higher energy X-ray data in a fast and user-friendly workflow. 
  • The larger depth of X-ray excitation allows the characterization of multilayer systems starting from 1 nm and ranging up to 40 µm, which is not possible with electron excitation.


Expand your SEM analytical capabilities with the Micro-XRF and Rapid Stage

  • Dual beam potential, both an e-beam and an X-ray beam, which offers new possibilities for the material characterization - Investigate samples simultaneously with both sources.
  • Using the same detector for simultaneous e-beam/ micro-XRF acquisition, incorporating light element spectral data as well as trace element and/ or higher energy X-ray data. 
  • Both XTrace and Rapid Stage are seamlessly integrated in the ESPRIT software.
  • Combined EDS and micro-XRF quantification results in a more complete sample characterization by combining the better light element sensitivity of electron excitation with the better trace element sensitivity of XRF.
  • Simultaneous mapping with micro-XRF and e-beam excitation, combining the advantages from both worlds. Exciting the light elements (carbon to sodium) using the e-beam and heavier elements by micro-XRF.
  • Separate peaks & extended spectral range enables the capability to see the high energy K- lines since they are less complex and less overlapped.
  • Minimum sample prep – no conductive sample surface and no extensive polishing required
  • Standardless and standard-based quantification.


Incorporating Light and Heavy Elements even at Low Concentration Levels at a µm Scale


Rapid Stage

The Rapid Stage can be mounted on top of the SEM stage for fast mapping over large sample areas.