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関連資料

• PeakForce sMIM - App Note 2.5MB

Scanning microwave impedance microscopy (sMIM) is an AFM-based technique for materials and device characterization that does not require making electrical contact between the sample and the substrate.It works by reflecting the microwave signal from the tip-sample interface to reveal the electrodynamic properties of the sample surface and sub surface due to the penetration of the near field signal.