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評価・試験・計測

In SEM/TEMナノインデンター

ナノインデンターと電子顕微鏡を組み合わせ、力学試験を”見える化”

SEM・TEM内でのin-situナノ機械特性評価

ブルカーのナノインデンター製品群の一つであるHysitron PIシリーズ PicoIndenterは、SEM・TEM内で材料の変形や破壊過程をリアルタイムに観察しながら、硬さや弾性率などの機械特性を定量評価できます。機械特性と組織変化を直接結び付けた、その場解析を実現します。

独自のトランスデューサー設計により、試験中を通して優れた安定性を発揮し、ナノスケール領域においても高精度な定量データを取得できます。また、顕微鏡の映像を利用して試験中の変形挙動をリアルタイムで観察できるため、機械特性と微細構造変化を直接関連付けた解析が可能です。

主要なSEM・TEMメーカーに対応した豊富なラインアップを取り揃えており、研究目的や装置環境に最適なシステムを選択いただけます。

製品ラインナップ

Hysitron PI 89 SEM PicoIndenter

高度なイメージングと多彩なその場力学試験を統合し、最先端の材料研究、測定・解析の自動化に対応するフラッグシップモデル
詳細はこちら

Hysitron PI Envision SEM PicoIndenter

SEM内でのナノインデンテーションや圧縮試験を容易に実施できる、汎用性に優れたモデル
詳細はこちら

Hysitron PI 80 SEM PicoIndenter

SEM内でのその場ナノ力学試験をシンプルかつ高精度に実現するコンパクトモデル
詳細はこちら

Hysitron PI 95 TEM PicoIndenter

TEM内で材料の変形挙動を直接観察しながら機械特性を定量評価できる高性能システム
詳細はこちら

ラボ向けナノインデンター

ナノ・マイクロスケールにおける高精度・高信頼な機械特性およびトライボロジー評価を実現します。
詳細はこちら

顕微鏡・分析装置連携ナノインデンター

光学顕微鏡、ラマン顕微鏡、X線顕微鏡、AFMなどと連携し、材料の構造・化学情報と機械特性を相関評価します。
詳細はこちら
カタログのダウンロードはこちらから
測定モード

変形を観察し、機械特性を定量評価する

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ナノインデンテーション

高精度な位置決めとナノスケールでの荷重・変位制御により、硬さや弾性率などの基本的な機械特性を定量評価します。

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引張試験

ドッグボーン試験片や薄膜、ナノワイヤの引張・押引試験（Push-to-Pull）により、低次元材料の応力-ひずみ挙動をin-situで評価します。

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曲げ試験

SEM観察下で試験片寸法や測定位置を正確に確認・制御し、単相材料、複合材料、多層材料の曲げ剛性や破壊靭性を評価します。

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圧縮試験

マイクロピラーや粒子などの微小構造を圧縮し、変形挙動をリアルタイムで観察しながら応力-ひずみ特性や降伏特性を評価します。

In SEM/TEMナノインデンターFAQ

よくあるご質問

In-situナノインデンテーションとは？

In situナノインデンテーションは、SEMやTEM、光学顕微鏡を用いて材料の変形挙動をリアルタイムに観察しながら、硬さ、弾性率、破壊特性、クリープ特性などの機械特性をナノスケールで評価する技術です。

In-situナノインデンテーションの利点は？
  • 変形・破壊プロセスをその場で観察可能
  • 微細構造や特定部位への高精度な位置決めが可能
  • 力学応答と組織変化を直接関連付けて解析可能
  • 変形挙動を可視化できるため、より高い信頼性でデータを解釈可能
どのような材料を評価できますか？

In-situナノインデンテーションは金属、セラミックス、高分子、薄膜・コーティングから、ナノワイヤやMEMSデバイスまで、幅広い材料・微細構造の力学特性を評価できます。

In SEM/TEMナノインデンターシステムの構成要素は？
  • 荷重・変位を高精度に制御するナノインデンター
  • 高精度位置決めステージ
  • SEM、TEMまたは光学顕微鏡
  • データ取得・解析ソフトウェア
  • 制御コントローラー
  • フィードスルー（In SEM PicoIndenter向け）
SEM PicoIndenterで利用可能な荷重・変位レンジは？

システムおよびトランスデューサーの仕様によって異なります。PI Envisionシステムおよびトランスデューサーの仕様によって異なります。PI Envision SEM PicoIndenterは最大250 mNの荷重と150 µmの変位に対応しています。一方、PI 89 SEM PicoIndenterは最大3.5 Nの荷重および150 µmの変位に対応します。

In SEMナノインデンターは高温・低温環境でも測定できますか？

加熱・冷却ステージを組み合わせることで、高温環境から極低温環境まで幅広い温度条件でナノインデンテーション試験を実施できます。PI Envisionは室温から800℃まで、PI 89は-150℃から1000℃までの温度範囲に対応しており、材料の温度依存的な力学特性を評価可能です。

高ひずみ速度試験は可能ですか？

はい。PI 89などの先進的なシステムでは、最大10³ s⁻¹レベルの高ひずみ速度試験に対応しており、さまざまな温度条件下で材料の変形挙動を評価できます。

ナノインデンテーションデータはどのように解析しますか？

ナノインデンテーションでは、試験中に取得される荷重-変位曲線を解析することで、硬さ、弾性率、クリープ特性、破壊特性などの材料特性を定量的に評価できます。解析にはOliver-Pharr法をはじめとする各種モデルが用いられ、材料の機械的特性を高精度に算出します。

In-situナノインデンテーションは破壊現象の解析にどのように役立ちますか？

In-situナノインデンテーションでは、き裂の発生・進展や塑性変形、破壊挙動をその場で観察できます。力学応答と変形プロセスを直接関連付けて解析できるため、破壊メカニズムの解明や故障解析に有効です。

In-situナノインデンテーションのデータ解析にはどのようなソフトウェアが使用されますか？

ブルカーはデータ取得から試験制御、解析までを一元管理できるソフトウェアプラットフォームとして、TriboScanおよびTriboIQを提供しています。

ナノインデンテーションデータとSEM/TEM画像・動画を同期できますか？

はい。ブルカーのPicoIndenterでは、荷重・変位データとSEM/TEM動画を同期して取得できます。これにより、変形・破壊プロセスと力学特性データを直接関連付けて解析することが可能です。

1次元材料（ナノワイヤ・ナノチューブ）および2次元材料（薄膜）はどのように評価できますか？

ブルカーはナノ構造の力学特性評価向けに、Push-to-Pull（PTP）デバイスおよびElectrical Push-to-Pull（E-PTP）デバイスを提供しています。

  • PTPデバイスによる引張試験: PTPデバイスでは、ナノワイヤなどを専用グリップ間に固定することで、高精度な一軸引張試験を実施できます。これにより、1次元ナノ構造体のナノ圧縮試験で生じやすいアライメント誤差の影響を回避しながら、引張特性を評価できます。
  • E-PTPデバイスによる引張試験: E-PTPは、PTPデバイスに電気接点を組み込んだシステムであり、1次元・2次元材料に対して機械特性と電気特性を同時に評価できます。応力・ひずみと電気伝導度の変化を同時に測定できるため、電気機械特性の相関、荷重下での劣化挙動、圧電材料の評価、各種デバイス特性評価に有効です。
技術資料

ナノインデンターウェビナー

ブルカーは様々なウェビナーを通して、新しい製品やアプリケーション、評価事例をご紹介しています。大学・民間より深い知見を持つ講師をお招きし、招待講演として最先端の研究事例のご紹介いただいております。

ジャーナルクラブ・電子書籍

ジャーナルクラブ

ナノインデンターを用いた最新の研究事例を電子メールで定期的にご紹介しています。ご興味のある方はぜひ購読登録ください。
ナノメカニカルテストジャーナルクラブ

バッテリー研究電子書籍

この電子書籍はリチウムイオン電池材料の特性を示す分析技術を紹介しています。特にナノインデンターと原子間力顕微鏡を用いた技術に焦点を当てています。
電子書籍をダウンロード
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リサーチハイライト：Tevis Jacobs博士

動的ナノ機械特性評価における接触面積および電気伝導評価について、In-situ観察を活用した研究成果を紹介しています。
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リサーチハイライト：Bharat Gwlalani博士

固相加工材料のナノスケール力学特性評価と、加工プロセスが材料組織および特性に与える影響の解明に関する研究成果を紹介しています。
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In-situナノインデンター アプリケーションノート ライブラリー

少なくとも2文字を使用してください (現在1文字を使用しています) 。
学術論文

SEM PicoIndenterを用いた主要論文

2025
  • Schmalbach, K.M., Hintsala, E.D., Bhowmick, S. and Stauffer, D.D. 2025. Accelerated Correlation of Microstructure–Mechanical Property Relationships in Laser Clad Steels. JOM 77 (6): p.4081–89. https://doi.org/10.1007/s11837-025-07322-1
  • Zhang, Y., Dillon, S. & Lambros, J. Opening-Dominated Fracture Characterization of Single Crystal Spinel in the Transmission Electron Microscope. Exp Mech (2025). https://doi.org/10.1007/s11340-025-01206-w
  • Kang, DH., Cho, S., Kim, H.Y. et al. Silicon nanocolumn-based disposable and flexible ultrasound patches. Nat Commun 16, 6609 (2025). https://doi.org/10.1038/s41467-025-61903-x
  • Gong, J., Darnbrough, J.E. and Wilkinson, A.J., 2025. Temperature-dependent Slip Properties and Strain Rate Sensitivities of< a> Prismatic,< a> Basal, and< c+ a> Slip Systems in Zircaloy-4: Insights from Single-crystal Microcantilever Testing. Materials Science and Engineering: A, p.148535. https://doi.org/10.1016/j.msea.2025.148535
  • Ajantiwalay, T., Bohanon, B., Warren, P.H., Dubey, M., Wu, Y., Wharry, J.P. and Aitkaliyeva, A., 2025. Observations of the irradiation hardening behavior in neutron irradiated HT-9 steels through in situ TEM nano-mechanical tests. Journal of Nuclear Materials, 604, p.155497.  https://doi.org/10.1016/j.jnucmat.2024.155497
  • Dillon, S.J., Schoell, R.M., Wright, A., Luo, J., Rabkin, E. and Hattar, K., 2025. Creep and failure at metal-oxide interfaces. Acta Materialia, 283, p.120563.  https://doi.org/10.1016/j.actamat.2024.120563
  • Bombarda, I., Wich, F., Langhof, N., Sitzmann, C. and Schafföner, S., 2025. High temperature tensile strength of ultrathin 3YSZ tapes: An experimental study combining Weibull theory and fracture mechanics. International Journal of Hydrogen Energy, 164, p.150764.  https://doi.org/10.1016/j.ijhydene.2025.150764
  • Ida, S., Nakagawa, E., Paul, V., Ohmura, T. and Yoshimi, K., 2025. Enhanced deformability of TiC in Mo-Ti-C ternary system by off-stoichiometry. Materialia, p.102412.  https://doi.org/10.1016/j.mtla.2025.102412
  • Hartmann, J., Varga, T., Schenck, C., McRobie, C., Tsai, F.Y., Shutthanandan, V., Devaraj, A., Senor, D., Gwalani, B. and Kautz, E., 2025. Structure evolution and tin redistribution during oxidation of Zircaloy-4 at 500° C. Journal of Nuclear Materials, p.155895.  https://doi.org/10.1016/j.jnucmat.2025.155895
  • Ajantiwalay, T., Li, L., Haag IV, J.V., Niverty, S., Kalsar, R., Devaraj, A., Soulami, A. and Joshi, V.V., 2025. Evaluating the bond strength and fracture mechanisms of cold-sprayed zinc coating on AZ91 magnesium substrate via a combined experimental and computational approach. Journal of Magnesium and Alloys.  https://doi.org/10.1016/j.jma.2025.08.027
  • Schenk, O., Doost, M.V., genannt Wäcken, P.B., Meurer, M., Bergs, T. and Broeckmann, C., 2025. Multiscale characterization of surface integrity of machined Inconel 718. Materials Letters, p.139507.  https://doi.org/10.1016/j.matlet.2025.139507
  • Sarac, A., Yilmaz, H., Alkan, B. and Bucsek, A., 2025. Size Effect on Compressive Strength and Deformation of Additively Manufactured 316L Stainless Steel Micropillars. Materials Science and Engineering: A, p.148752.  https://doi.org/10.1016/j.msea.2025.148752
2024
  • Aleman, Angel, Hicham Zaid, Koichi Tanaka, Jenn-Ming Yang, Suneel Kodambaka, and Hanna Kindlund. 2024. “Unusual Secondary Slip Activity at Room Temperature in VC Single Crystals.” Materials & Design 244 (August): 113195. https://doi.org/10.1016/j.matdes.2024.113195.
  • An, Qi, Zhe Yan, Lichen Bai, and Shijian Zheng. 2024. “Achieving Superior Matching of Strength, Plasticity, and Strain Hardening in Multilayers by Introducing Metastable Amorphous Interface Phase.” Scripta Materialia 252 (November): 116258. https://doi.org/10.1016/j.scriptamat.2024.116258.
  • Bignoli, Francesco, Philippe Djemia, Giancarlo Terraneo, Gregory Abadias, Christoph Gammer, Alice Lassnig, Camila A. Teixeira, et al. 2024. “Novel Class of Crystal/Glass Ultrafine Nanolaminates with Large and Tunable Mechanical Properties.” ACS Applied Materials & Interfaces 16 (27): 35686–96. https://doi.org/10.1021/acsami.4c02610.
  • Bijun Xie, Hangman Chen, Pengfei Wang, Cheng Zhang, Bin Xing, Mingjie Xu, Xin Wang, Lorenzo Valdevit, Julian Rimoli, Xiaoqing Pan, Penghui Cao. 2024. “Divergent Evolution of Slip Banding in Alloys.”
  • Cao, Qingping, Nan Wang, Jae-Moo Kim, Arnaud Caron, Zhipeng Zhang, Haofei Zhou, Xiaodong Wang, Shaoqing Ding, Dongxian Zhang, and Jian-Zhong Jiang. 2024. “A Dual-Phase Fe-Co-Ni-Cr-Mn High Entropy Alloy Thin Film with Superior Strength and Corrosion-Resistance.” Journal of Alloys and Compounds 1003 (October): 175551. https://doi.org/10.1016/j.jallcom.2024.175551.
  • Dabney, Tyler Alexander. 2024. “Development of Cold Spray Cr Coatings on Zr-Alloy for Advanced Nuclear Fuel Cladding.”
  • Duan, Fenghui, Qian Li, Zhihao Jiang, Lin Zhou, Junhua Luan, Zheling Shen, Weihua Zhou, et al. 2024. “An Order-Disorder Core-Shell Strategy for Enhanced Work-Hardening Capability and Ductility in Nanostructured Alloys.” Nature Communications 15 (1): 6832. https://doi.org/10.1038/s41467-024-50984-9.
  • Flamourakis, George, IOANNIS SPANOS, Zacharias Vangelatos, Costas Grigoropoulos, Anthi Ranella, and Maria Farsari. 2024. “Laser-Made Mechanical Metamaterials: Towards the Development of 4D Scaffolds for Cell Growth.” In Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024, edited by Andrei v. Kabashin, Maria Farsari, and Masoud Mahjouri-Samani, 11. SPIE. https://doi.org/10.1117/12.3004008.
  • Gasper, C., I. Y. Gao, F. A. Busch, A. Ziemons, D. Beckers, H. Springer, and S. Korte-Kerzel. 2024. “Preparation of Binary and Ternary Laves and Μ-Phases in the Ta–Fe(–Al) System for Property Analysis at the Microscale.” Metallurgical and Materials Transactions A 55 (7): 2244–63. https://doi.org/10.1007/s11661-024-07390-z.
  • Ghodki, Nandita, Shristy Jha, Siva Shankar Alla, Yu-Chia Yang, George M. Pharr, and Sundeep Mukherjee. 2024. “Deformation Behavior of Thermally Rejuvenated Zr-Cu-Al-(Ti) Bulk Metallic Glass.” Scientific Reports 14 (1): 20729. https://doi.org/10.1038/s41598-024-71658-y.
  • Gunjal, Vilas, Chandra Sekhar Tiwary, Kamanio Chattopadhyay, and Dipankar Banerjee. 2024. “Intermetallic Eutectics with Gigapascal Strength and Enhanced Ductility.” Intermetallics 168. https://doi.org/10.1016/j.intermet.2024.108228.
  • Ha, Sangyul, Saif Haider Kayani, Kyungjun Lee, Suwon Park, Hyunjoo Choi, Jae Bok Seol, Jung Gi Kim, and Hyokyung Sung. 2024. “Microscopic-Plastic Deformation Behavior of Grain Boundary Precipitates in an Al–Zn–Mg Alloy.” Journal of Materials Research and Technology 30 (May): 3420–29. https://doi.org/10.1016/j.jmrt.2024.04.044.
  • Hazendonk, Laura S. van, Zafeiris J. Khalil, Wilko van Grondelle, Levina E. A. Wijkhuijs, Ingeborg Schreur-Piet, Michael G. Debije, and Heiner Friedrich. 2024. “Hot Fingers: Individually Addressable Graphene-Heater Actuated Liquid Crystal Grippers.” ACS Applied Materials & Interfaces 16 (25): 32739–47. https://doi.org/10.1021/acsami.4c06130.
  • Hong, Jong-Dae, Hongryul Oh, Daehyeok Ahn, Dongchan Jang, Hyun-Gil Kim, JaeYong Kim, Hyochan Kim, and Martin Ševeček. 2024. “Micro-Mechanical Evaluations of Adhesion Properties for Cr-Coated Accident Tolerant Fuel Cladding.” Nuclear Materials and Energy 41 (December): 101799. https://doi.org/10.1016/j.nme.2024.101799.
  • Horbach, Lutz, Jiali Zhang, Tobias Sedlatschek, Felix Weber, Christian Gebhardt, Betto David Joseph, Andreas Bührig-Polaczek, and Christoph Broeckmann. 2024. “The Effect of Silicon on the Critical Resolved Shear Stress of Solid Solution Strengthened Ferritic Ductile Iron.” Materials & Design 244 (August): 113130. https://doi.org/10.1016/j.matdes.2024.113130.
  • Hou, Jingkun, Xianzhang Wu, Zhihan Li, Xingchi Li, Yu Liao, Lei Li, Sha Luo, Yiqiang Wu, and Yan Qing. 2024. “Aligned Bamboo Fiber‐Induced Crystallinity Mitigation of Lightweight Polymer Composite Enables Ultrahigh Strength and Unprecedented Toughness.” Advanced Functional Materials 34 (27). https://doi.org/10.1002/adfm.202314559.
  • Hu, C., Y.X. Liu, B.B. He, and M.X. Huang. 2025. “Role of Intermetallic Networks in Developing High-Performance Austenitic Steel.” Acta Materialia 283 (January): 120494. https://doi.org/10.1016/j.actamat.2024.120494.
  • Jang, Dongchan, Woosuk Seo, Daehyeok Ahn, Hadi Ghaffarian, Tae-Ho Lee, Eun-Soo Park, Keumhwan Park, and Yongjo Kim. 2024. “Design and Fabrication of Highly Elastic and Largely Deformable Nanolaminate Amorphous-Crystalline Metallic Electrodes for Deformable Displays.” https://doi.org/10.21203/rs.3.rs-4539893/v1.
  • Janknecht, Rebecca, Rainer Hahn, Nikola Koutná, Tomasz Wójcik, Eleni Ntemou, Andreas Steiger-Thirsfeld, Zhuo Chen, et al. 2024. “A Strategy to Enhance the B-Solubility and Mechanical Properties of Ti–B–N Thin Films.” Acta Materialia 271 (June): 119858. https://doi.org/10.1016/j.actamat.2024.119858.
  • Jha, Shristy, Siva Shankar Alla, Sanjit Bhowmick, and Sundeep Mukherjee. 2025. “Temperature Dependent Small-Scale Deformation of a Refractory High Entropy Alloy.” Materials Letters 379 (January): 137649. https://doi.org/10.1016/j.matlet.2024.137649.
  • Kakaraparty, Karthik, Erik A. Pineda, Baylee Schumacher, Russell C. Reid, and Ifana Mahbub. 2024. “Advanced Bias-Free Energy Harvesting Based on High-Dielectric Flexible Electrodes with Reverse Electrowetting-on-Dielectric.” IEEE Sensors Journal 24 (7). https://doi.org/10.1109/JSEN.2023.3345841.
  • Kim, Ho A., Ju Seong Kim, Yundong Lee, Sangbum Kim, Youho Lee, Yong Soo Kim, Joo Hee Kang, and Sangtae Kim. 2024. “Microstructure and Mechanical Properties of Hydride Blisters Formed on Zircaloy-4 Claddings.” Journal of Nuclear Materials 588. https://doi.org/10.1016/j.jnucmat.2023.154777.
  • Lam, S., D. Frazer, F. Cappia, M. Nelson, S. Samuha, S. Pitts, B. Harris, and P. Hosemann. 2025. “Length Scale Effects of Micro- and Meso‑scale Tensile Tests of Unirradiated and Irradiated Zircaloy-4 Cladding.” Journal of Nuclear Materials 604 (January): 155469. https://doi.org/10.1016/j.jnucmat.2024.155469.
  • Lee, Do Hoon, Taesu Lim, Jeongsu Pyeon, Hyunmin Park, Sang‐Won Lee, Seungkyu Lee, Wonsik Kim, et al. 2024. “Self‐Mixed Biphasic Liquid Metal Composite with Ultra‐High Stretchability and Strain‐Insensitivity for Neuromorphic Circuits.” Advanced Materials 36 (16). https://doi.org/10.1002/adma.202310956.
  • Lehnert, R., V. Remich, G. Gerstein, M. Motylenko, M. Müller, P. Krooß, T. Niendorf, H. Biermann, and A. Weidner. 2024. “Unraveling Factors Affecting the Reversibility of Martensitic Phase Transformation in FeNiCoAlTi Shape Memory Alloys: Insights from HR-EBSD and Acoustic Emission Analysis.” Acta Materialia 276 (September): 120146. https://doi.org/10.1016/j.actamat.2024.120146.
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2023
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2022
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