Si-based
Chemical Composition of Semiconductor Interconnects
Standard energy dispersive X-ray spectroscopy (EDS or EDX) using detector areas of 30mm² on conventional scanning transmission electron microscopes (STEM) can deliver element mappings with nm resolution within a few minutes. The condition is, that the detector head is small enough (in slim-line design) to get as close to the specimen for (high solid angle) and as high above the specimen (for high take-off angle) as possible. The latter helps to avoid shadowing and absorption effects.
Semiconductor Interconnects