AFM 模式

扫描扩散电阻显微镜（SSRM 和 SSRM-HR）

广范围电阻映射和最高空间分辨率载波密度分析

发光二极管（LED）、光电探测器和二极管激光器基于半导体技术，其开发和制造取决于以高分辨率测量其两维电气性能的能力。

扫描扩散电阻显微镜（SSRM）与扫描电容显微镜（SCM）一样，可在半导体样品表面实现同步地形成像和 2D 载波密度映射。SSRM 将高力的接触模式反馈与宽范围放大器结合使用，从而获得扩散电阻和载波密度的测量。

尺寸图标^® SSRM-HR 封装在 2D 载波密度映射中实现了最高的空间分辨率和可重复性，因此成为领先半导体工作的首选配置。

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ZnO 样品的 SSRM 通道。1.8μm 扫描大小。（样本由涂布劳恩施魏格教授提供）

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