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▶ WATCH ON-DEMAND | 2 Hrs 55 MINUTES

Surface Characterization of Semiconductor Materials and Devices

Explore the nanoscale properties of semiconductor materials

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Watch Now | 26 Minutes

AFM Applications for Semiconductors: Automation, Metrology, and Advanced Techniques

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Presented by John Thornton, Sr. Applications Engineer, Bruker (July 7, 2021)

       PRESENTATION HIGHLIGHTS:

High-Resolution Topography

  • [00:03:27] Principles of AFM
  • [00:05:46] Surface topography imaging
  • [00:08:15] Dimensional metrology
  • [00:10:32] Automated measurements
  • [00:12:31] Practical demonstration

Beyond Topography

  • [00:20:14] Nano-electrical
  • [00:23:00] Nano-mechanical
Learn More: AFMs for Materials
Watch Now | 23 Minutes

Nanoscale Chemical Analysis of Contaminants Using Photothermal AFM-IR

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Presented by Cassandra Phillips, Ph.D., Applications Scientist, Bruker (July 7, 2021)

       PRESENTATION HIGHLIGHTS:

  • [00:01:25] Introduction
  • [00:03:03] Photothermal AFM-IR overview
  • [00:04:33] Process induced defects in interconnect structures
  • [00:07:50] Organic nano-contaminants
  • [00:09:50] How to identify an unknown sample
  • [00:11:06] Demonstration
  • [00:18:30] Inorganic nano-contaminants
  • [00:19:31] Summary
  • [00:20:03] Q&A
Learn More: NanoIR Spectrometers
Watch Now | 25 Minutes

Mechanical Characterization of Semiconductor Samples and Devices

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Presented by Douglas Stauffer, Ph.D., Senior Manager of NI Applications Development, Bruker (July 7, 2021)

       PRESENTATION HIGHLIGHTS:

  • [00:00:00] Introduction
  • [00:02:45] Hysitron product basics
  • [00:04:15] Nanoindentation explained
  • [00:05:52] Mechanics of CU pads and Sn solders
  • [00:10:24] Accelerated property mapping
  • [00:14:21] Process monitoring: Ultra low-k mechanics
  • [00:21:14] Advanced testing
  • [00:22:40] Q&A
More: Nanomechanical Testers
Watch Now | 29 Minutes

Semiconductor 3D Metrology Using Optical & Stylus Profilers

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Presented by Sandip Basu, Ph.D., Application Scientist, Bruker (July 7, 2021)

PRESENTATION HIGHLIGHTS:

Stylus profilometry

  • [00:01:43] Introduction to stylus profilometry
  • [00:07:42] Semiconductor and microelectronics applications
  • [00:08:26] Vision64 software demonstration

Optical profilometry

  • [00:12:00] Introduction to optical profilometry
  • [00:16:49] Semiconductor applications
  • [00:21:56] Vision64 software demonstration
  • [00:26:40] Summary
Learn More: 3D Optical Profilers Learn More: Stylus Profilometers
Watch Now | 36 Minutes

Bridging the Gap Between Bench-Scale Research and Commercial Manufacturing

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Presented by Kora Farokhzadeh, Ph.D., Application Scientist, Bruker (July 7, 2021)

       PRESENTATION HIGHLIGHTS:

  • [00:02:30] Introduction
  • [00:09:56] Instrumentation and process parameters
  • [00:14:10] Practical applications and experiments
  • [00:34:40] Summary
Learn More: Mechanical Testers
Watch Now | 32 Minutes

Automated AFM Metrology of Semiconductor Wafers for Yield Management

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Presented by Ingo Schmitz, Ph.D., Technical Marketing Engineer, Bruker (July 7, 2021)

       PRESENTATION HIGHLIGHTS:

  • [00:01:44] Introduction
  • [00:03:06] Chemical mechanical planarization
  • [00:12:26] Demonstration: fully automated AFM profiling
  • [00:19:58] Defectivity
  • [00:29:19] Automation
  • [00:30:36] Summary
Learn More: Automated AFMs

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