BRUKER NANO ANALYTICS PRESENTS: XFlash® 7 Detector Webinar Series Part II

Achieving sub-10 nm EDS Spatial Resolution on Bulk Specimen in SEM

On-Demand Session - 37 Minutes 

Measurements at High Spatial Resolution

Chemical mapping of nanoscale features in bulk samples is known to be very challenging since it requires achieving simultaneous high spatial resolution imaging and spectroscopic analysis. The typical alternative is chemical mapping on electron transparent samples in STEM.

The newly launched Bruker XFlash® 7 EDS detectors have the best solid angle and highest pulse processing speeds ensuring the highest collection efficiency and high sensitivity. This combination is ideal for measurements at high spatial resolution because it provides excellent output count rates at low probe currents.

In this webinar, we demonstrate examples of bulk semiconductor and aerospace materials with challenging element combinations, where sub-10 nm EDS-spatial resolution are achieved using low and high kVs. We also discuss the common challenges for acquiring high spatial resolution EDS data on bulk materials in SEM and show you how to maximize the analytical capabilities of your SEM.


If you want to learn more about how to enhance your EDS make sure to view the other webinars available in our XFlash® 7 series:

Chemical map showing the distribution of Co, Si and W in bulk semiconductor materials with spatial resolution from EDS
Distribution of Ni and Cr in Ni-based single crystal super alloy acquired at high magnifications in SEM


Dr. Purvesh Soni

Application Scientist EDS, Bruker Nano Analytics

Dr. Igor Németh

Application Scientist EDS, Bruker Nano Analytics

* The On-Demand registration form is optimized to work with the browser Google Chrome.

Watch this Webinar On-Demand

Please enter your details below to gain on-demand access to this webinar. 

Input value is invalid.

* Please fill out the mandatory fields.

Please enter your first name
Please enter your first name
Please enter your e-mail address
Please enter your first company / institution
What best describes my current situation:
Please accept the Terms and Conditions

* Please fill out the mandatory fields.

Thank you. Enjoy your On-Demand Webinar


Thank you for signing up to watch our on-demand webinar Achieving Sub-10 nm EDS Spatial Resolution on Bulk Specimen in SEM. We have also sent an email to your registered address containing the link to watch the webinar. 

If you have questions about the content of the webinar or about any of our other products and services, please contact us at

You can also contact our regional offices by email at: 

Europe, Middle East and Africa: