BRUKER NANO ANALYTICS PRESENTS: XFlash® 7 Detector Webinar Series Part II

Achieving sub-10 nm EDS Spatial Resolution on Bulk Specimen in SEM

On-Demand Session - 37 Minutes 

Measurements at High Spatial Resolution

Chemical mapping of nanoscale features in bulk samples is known to be very challenging since it requires achieving simultaneous high spatial resolution imaging and spectroscopic analysis. The typical alternative is chemical mapping on electron transparent samples in STEM.

The newly launched Bruker XFlash® 7 EDS detectors have the best solid angle and highest pulse processing speeds ensuring the highest collection efficiency and high sensitivity. This combination is ideal for measurements at high spatial resolution because it provides excellent output count rates at low probe currents.

In this webinar, we demonstrate examples of bulk semiconductor and aerospace materials with challenging element combinations, where sub-10 nm EDS-spatial resolution are achieved using low and high kVs. We also discuss the common challenges for acquiring high spatial resolution EDS data on bulk materials in SEM and show you how to maximize the analytical capabilities of your SEM.


If you want to learn more about how to enhance your EDS make sure to view the other webinars available in our XFlash® 7 series:

Chemical map of a bulk semiconductor material showing distribution of Co, Si and W with high EDS spatial resolution
Distribution of Ni and Cr in Ni-based single crystal super alloy acquired at high magnifications in SEM


Purvesh Soni

Application Scientist, Bruker Nano Analytics

Dr. Igor Nemeth

Application Scientist, Bruker Nano Analytics

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