Dektak XTL
Dektak XTL
Le profilomètre à stylet Dektak XTL™ accepte des échantillons jusqu'à 350 mm x 350 mm, apportant la répétabilité et la reproductibilité légendaires de Dektak® à la fabrication de plaques et de panneaux grand format. Le Dektak XTL est doté d'une isolation pneumatique contre les vibrations et d'un poste de travail entièrement fermé avec une porte à verrouillage facile d'accès, ce qui le rend idéal pour les environnements de production exigeants d'aujourd'hui. Son architecture à double caméra permet une meilleure perception de l'espace, et son haut niveau d'automatisation maximise le rendement de la production.
Le Meilleur Logiciel d'Automatisation et d'Analyse de l'Industrie
Des fonctions logicielles améliorées font du Dektak XTL le profileur à stylet le plus puissant et le plus facile à utiliser du marché. Le système utilise le logiciel Vision64 qui permet un nombre illimité de sites de mesure, une cartographie 3D et une caractérisation hautement personnalisée avec des centaines d'outils d'analyse intégrés. Le logiciel Vision Microform mesure également les formes, comme le rayon de courbure. La reconnaissance des formes minimise les erreurs de l'opérateur et améliore la précision de la localisation des mesures. Ce logiciel tout-en-un combine la collecte et l'analyse des données avec un flux de travail intuitif.
Une Technologie de Stylet Inégalée
Le Dektak XTL s'appuie sur plus de 50 ans d'expertise en matière de stylets et de personnalisation d'applications destinées aux installations de production afin de répondre aux feuilles de route rigoureuses de l'industrie actuelle et future. La mise en scène encodée XY de 300 millimètres, extrêmement précise, offre aux fabricants un outil fiable pour répondre aux exigences rigoureuses de R&R des jauges. La commande à double caméra de Dektak, qui comprend des caméras à double vision et à fort grossissement, offre une meilleure perception spatiale. Le positionnement par pointer-cliquer dans la vidéo en direct permet aux opérateurs de placer rapidement les échantillons au bon endroit pour une configuration de mesure et une programmation d'automatisation rapides et faciles. La grande porte verrouillée du système offre un accès sûr et facile pour le chargement/déchargement des échantillons.
Parmi les autres caractéristiques matérielles, on trouve :
- Une architecture à arche unique et un isolement intégré des vibrations pour des performances de pointe.
- Un stylet à alignement automatique et à changement rapide
- Une platine encodée XY de haute précision pour une collecte de données automatisée plus rapide.
- La faible force N-Lite avec la technologie Soft Touch et la plage de mesure de 1 mm peuvent être utilisées simultanément pour mesurer des échantillons délicats et à forte amplitude verticale.
Frequently Asked Questions
Dektak XTL is designed for large-format and production-oriented measurements. It combines a motorized, high-accuracy encoded 300 mm XY stage, continuous 360° theta positioning, an enclosed workstation, integrated vibration isolation, and automation capabilities for process development and QA/QC environments.
Dektak XTL accommodates wafers up to 300 mm and samples up to 350 mm × 350 mm, with a maximum sample thickness of 50 mm. This supports both large wafers and panel or other large-substrate applications.
Dektak XTL uses dual-camera viewing with top and high-magnification side views. Operators can easily navigate to points of interest, orient the sample, and define scan start and end positions directly from the live video.
The encoded 300 mm XY stage and continuous theta positioning support automated measurements at unlimited measurement sites. Operators can program fiducials and measurement sites, while pattern recognition can improve measurement-location accuracy and reduce operator-to-operator variability. Measurement results can also be automatically analyzed and logged to a database.
Common applications include semiconductor wafers, touch panels, flat-panel displays, solar coatings, printed circuit boards, and flexible electronics. Measurements include deposited-film and resist step height, etch-rate determination, CMP erosion and dishing, coating thickness, and printed circuit board bumps and step heights.
You can request a quote using our online form, or contact us directly.
More About Bruker's Dektak Stylus Profiler Systems
The sample is placed on a slider that slides over a highly polished flat glass block. The surface profile is measured by drawing the sample slider at constant speed underneath the stylus tip.
The vertical movement of the stylus tip is measured using LVDT (Linear Variable Differential Transformer) technology, which converts the stylus displacement into a highly precise and linear electrical signal.
Benchtop systems can accommodate small coupons up to full 8” wafers, while production models support large wafers and panels up to 12” size with encoded stages and multi‑site automation. The maximum sample height is 50 mm. Exact limits depend on the model, stage travel, and accessories.
For step height, typical vertical repeatability is on the order of a few angstroms to ~1 nm under controlled conditions, with sub‑nanometer repeatability possible on optimized setups and certified standards. Some key variables affecting accuracy and repeatability are tip condition/geometry, applied force, sample fixturing, vibration/thermal stability, and analysis procedures.
The standard stylus force of a Dektak stylus profiler ranges from 1 to 15 mg. For very delicate materials the force range can be extended downward to 0.03 mg (N-Lite force range).
The Dektak diamond stylus tips have a cono-spherical shape with radii ranging from 25 µm down to very sharp 50 nm. Often, Dektak stylus profilers are equipped with a stylus tip with 2 µm radius which is the recommended stylus radius for roughness measurements.
Sharper styli may be used if higher lateral resolution is required, while styli with greater radii may be useful on very sensitive surfaces.
Dektak styli are easily exchanged within a minute with the included stylus exchange tool. No tiny screwdrivers, Allen wrenches, or tweezers needed. No recalibration needed: Stylus exchange does not affect the calibration of the vertical scale, force scale or optical view.
Every Dektak stylus profiler supports recipe-based workflows for measurement and data analysis. In addition to measurement and automated analysis, Dektak recipes support the acquisition of sample information (e.g., wafer ID and part number), automatic saving of data files using template-generated filenames, and reporting of analysis results (e.g., step heights and roughness) to database tables.
Dektak stylus profilers with motorized XY-stage also allow to generate and run multi-site automation recipes, complete with wafer registration with alignment features (manual or by optical pattern recognition) and automated analysis and database reporting.
Selecting and Upgrading a Dektak Stylus Profiler
- The sub-nm vertical resolution of the LVDT (Linear Variable Differential Transformer) height sensor enables the measurement of heights, depths, and roughness down to single-nanometer levels and below.
- The LVDT sensor technology provides a large vertical range (up to 1 mm) and at the same time very low stylus forces (down to 0.03 mg) with a single sensor head.
- The vertical scale calibration shows excellent long-term stability.
- Moving the sample over a polished flat glass block provides a reference surface that is flat within a few nanometers over the full scan length of 55 mm.
- Dektak styli can be easily exchanged using the included stylus exchange tool without a need for recalibration of vertical range or stylus force.
Lateral resolution is limited by tip radius, so choosing an appropriate tip is important. Steep slopes and narrow features can be misrepresented if the tip cannot access them fully. Very soft or tacky films may require minimal force and specific tips; in some cases, an optical profilometer may bebetter suited.
Bruker provides applications consulting, troubleshooting, and best practice guidance, along with optional service plans for ongoing support, maintenance, and training.
Contact us to arrange a demonstration or submit samples for an evaluation tailored to your test geometry and materials.
Bruker offers upgrade options for users of legacy Dektak systems. Contact us to discuss your current system, measurement requirements, and available options for moving to a current Dektak platform.