In this workshop, Accurate Metrology for Micro- and Nano-Fabrication with Stylus Profilometry, our speakers discuss key aspects of stylus profilometry, including the details researchers need to know to obtain reliable and repeatable results.
Particular attention is paid to the following topics:
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This workshop was recorded on: March 17, 2021
Many processes during micro/nano-fabrication require accurate and repeatable validation of surface profiles to ensure optimum product. In this workshop, we discuss aspects critical to achieving reliable and repeatable metrology using contact-type or stylus-type profilometers. You’ll see, through real-time demonstration, several common and important measurements for process verification.
Specifically, we address how to:
Additionally, we review best-practices for successful, repeatable step height and film thickness measurement using a stylus profilometer, as well as the functionalities that are fundamental to achieving the best results (including tilt correction, substrate form removal, step detection, etc.). We also highlight some of the DektakXT features and functionalities that make it an excellent tool for validating lithography, thin film deposition, etching, and micromachining steps where there is a need to measure small step heights.