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ContourX-500 3D Optical Profilometer

Fully Automated Benchtop for 3D Metrology

The ContourX-500 Optical Profilometer is the world’s most comprehensive automated benchtop system for fast, non-contact 3D surface metrology. Incorporating Bruker’s proprietary tip/tilt optical head, the system is fully programmable to measure surface features over a range of angles while minimizing tracking errors. The gage-capable ContourX-500 boasts unmatched Z-axis resolution and accuracy, and provides all of the industry-recognized advantages of Bruker’s white light interferometry (WLI) floor-standing models in a much smaller footprint. Utilizing the industry’s most-advanced user interface, ContourX-500 provides intuitive access to an extensive library of pre-programmed filters and analyses. Along with its new USI universal scanning mode, the profiler is easily customized for the widest range of complex applications, from QA/QC metrology of precision machined surfaces and semiconductor processes to R&D characterization for ophthalmics and MEMS devices.

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ContourX-500 3D Optical Profilometer

Advanced Automation

Bruker’s proprietary tip/tilt in the head provides unmatched user flexibility for production setup and inspection. By coupling the auto tip/tilt functionality with the optical path in the microscope head, Bruker has coupled the point of inspection to the line of sight independent of tilt. This results in less operator intervention provides the maximum reproducibility. The combination of this feature with automated staging and objectives makes the ContourX-500 ideally suited to “measure-on-demand” industrial requirements, all within a compact footprint.

Traditional pitch-and-roll stage designs require operator adjustment
of five axes of motion to maintain point of inspection on line of
sight for measurement. The unique Bruker tip/tilt in the head
design maintains the line of sight on the point of inspection —
regardless of tilt —resulting in optimized image acquisition and
fastest time to data.
WLI offers constant and ultimate vertical resolution for all objectives.

Unmatched Value and Analysis

With thousands of customized analyses and Bruker’s simple-to-use, yet powerful VisionXpress™ and Vision64® user interfaces, the ContourX-500 is optimized for productivity in the lab and on the factory floor. This unique hardware and software combination provide streamlined access to highly repeatable and high-throughput metrology measurement over-classing comparable metrology capabilities.