3D Optical Profilometer


Fully automated benchtop for 3D metrology

Najważniejsze informacje


The ContourX-500 Optical Profilometer is the world’s most comprehensive automated benchtop system for fast, non-contact 3D surface metrology. The gage-capable ContourX-500 boasts unmatched Z-axis resolution and accuracy, and provides all of the industry-recognized advantages of Bruker’s white light interferometry (WLI) floor-standing models in a much smaller footprint. The profiler is easily customized for the widest range of complex applications, from QA/QC metrology of precision machined surfaces and semiconductor processes to R&D characterization for ophthalmics and MEMS devices.

optical head
Measures surface features over a range of angles while minimizing tracking errors.
Most advanced
user interface
Provides intuitive access to an extensive library of pre-programmed filters and analyses.
air isolation
Provides best metrology precision in a space-efficient footprint.

Cechy charakterystyczne


Designed for Unmatched Benchtop Metrology

Bruker’s proprietary tip/tilt in the head provides unmatched user flexibility for production setup and inspection. By coupling the auto tip/tilt functionality with the optical path in the microscope head, Bruker has coupled the point of inspection to the line of sight independent of tilt. This results in less operator intervention provides the maximum reproducibility. Other hardware features include an innovative stage design for larger stitching capabilities and a 5MP camera with a 1200x1000 measurement array for lower noise, larger field-of-view, and higher lateral resolution. The combination of these features with automated staging and objectives makes the ContourX-500 ideally suited to “measure-on-demand” R&D and industrial metrology, all within a compact footprint.

Traditional pitch-and-roll stage designs require operator adjustment of five axes of motion to maintain point of inspection on line of sight for measurement. The unique Bruker tip/tilt in the head design maintains the line of sight on the point of inspection — regardless of tilt —resulting in optimized image acquisition and fastest time to data.

Streamlined Access to Extensive Analysis

Analysis of the bottom channel of a microfluidic device with direct extraction via Multiple Region from Vision64.

With thousands of customized analyses and Bruker’s simple-to-use, yet powerful VisionXpress™ and Vision64® user interfaces, the ContourX-500 is optimized for productivity in the lab and on the factory floor. Bruker’s new Universal Scanning Interferometry (USI) measurement mode provides fully automated, self-sensing surface texture, optimized signal processing while delivering the most accurate and realistic computation of the surface topography being analyzed. 


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