Dektak XTL Automation
Dektak XTL bannerv v1

大尺寸晶片和面板测量



全新的Dektak XTL™探针式轮廓仪优异的精确度、可重复性和再现性广泛应用于大尺寸晶片及面板制造业。该系统可容纳多达350mm x 350mm的样品,使得传奇性的Dektak系统可以实现从200mm到300mm的晶片制造。


DektakXTL operator v1
DektakXTL operator v1

 

The Dektak XTL features a small footprint and integrated isolation with interlocking doors, making it ideal for today's demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation enhances manufacturing throughput. Bruker's exclusive Vision64 advanced production interface with optional pattern recognition makes data collection an intuitive and repeatable process, and minimizes operator-to-operator variability.

New software features make the Dektak XTL the most powerful, easiest to use stylus profiler available. The system utilizes Vision64 software that is fully compatible with Bruker’s optical profiler line. The Vision64 software enables unlimited measurement sites, 3D mapping, and highly customized characterization with hundreds of built-in analysis tools.

Also use Vision Microform software to measure shapes such as radius of curvature. Use pattern recognition to minimize operator error and enhance measurement location accuracy. Data collection and 2D and 3D analysis are in one software package with an intuitive flow. Each system comes with a Vision software license which can be installed on a separate PC with Windows 7 OS so data analysis and reports can be created at your desk.

DektakXTLVision64 screenshot

Dektak XTL已经针对持续生产工作时间和最大生产量在工艺开发和质量保证与质量控制应用方面进行了全面优化,将本产品设计为业界最易使用的探针式轮廓仪。