Among many new hardware and software options, a major enhancement to our TKD solution is brought by the new OPTIMUS 2 detector head. The redesigned detector head is made of high-performance materials and components for minimized interference with the incident e-beam and signal. It also has a new design of the screen frame to improve handling. Most importantly, OPTIMUS 2 is now compatible with OPTIMUS-VUE, an additional new screen featuring a high-performance Si diode at its center. For applications requiring the acquisition of signal close to the optical axis of the SEM, OPTIMUS 2 can still be used with a normal screen. Both screen types are user replaceable. Last but not least, both screen types have now an extra thin film in their active layer structure for improved signal quality.
OPTIMUS-VUE’s center diode enables Bright Field (BF) like imaging while in mapping position paving the way for new possibilities and further improving overall system performance. Here are its key benefits:
OPTIMUS-VUE’ center diode provides the ideal conditions for optimizing beam focus and astigmatism to obtain the best spatial resolution settings before acquiring a TKD map.
On-axis TKD sample-detector geometry (insert) and ultra-high resolution BF-like image acquired with built-in ARGUS imaging system in 3s from a Ru thin film sample using 30 kV accelerating voltage and 400 pA probe current. Scale bar represents 70 nm.
Near real-time visualization of electron transparent samples during in-situ experiments in the SEM using the new Time Resolved Measurements (TRM) feature.
Productivity boost by facilitating the creation and use of binarized masks with the new MaxYield feature to map custom shaped regions of interest on grid samples containing nanoparticles or nanorods as well as other discontinuous samples.
ARGUS BF-like images can be quickly & comfortably acquired, filtered, and subsequently used as random shaped masks to map the regions of interest in the shortest time possible.
Convenience, efficiency & assured success during the calibration procedure of the new Full Immersion Lens TKD (FIL-TKD) feature enabling, for the first time ever, TKD mapping using the full immersion lens mode, a.k.a. UHR-mode, of certain electron columns.