X-Ray Defect Inspection


High resolution XRDI system specifically designed for production monitoring of SiC

X-ray diffraction imaging (XRDI) inspection system


The Sensus-CS is a high resolution XRDI system specifically designed for production monitoring of SiC. It uses a high brightness rotating anode source with a 5µm resolution detector to collect high resolution images in <30 minutes for full 150mm wafers, more than 10x faster than previous systems. The system can be equipped with full robot loading, and an optional mini-environment for full production capability. SECS-GEM software can be installed to enable full automation from the factory host.


5µm resolution
Collects high resolution images
<30 minutes
for full 150mm wafers
More than 10x faster than previous systems
for full production
Add robot loading, mini-environment, and SECS-GEM

Automatic Defect Detection

With fully automated operation it also provides a complete solution from material research to full production deployment. The system features fully automated sample alignment, measurement and analysis. The analysis enables the determination of TED, TSD and BPD densities separately with automatic defect recognition and standard KLARF output.


How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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