TriboLab CMP
TriboLab CMP 利用其前身产品 （Bruker CP-4） 超过 20 年的 CMP 领域专业知识，为业界领先的 TriboLab 平台带来了一套完整的功能。基于本套设备产生的高精度和高可重复性使得在整个 CMP 流程中能够进行高效的鉴别、检查和连续功能测试。TriboLab CMP 能够提供广泛的抛光压力 （0.05-50 psi）、速度（1 至 500 rpm）、摩擦、声发射和表面温度测量的工艺开发工具，可准确、完整地描述 CMP 工艺和耗材
To learn more, continue reading, contact us, or see FAQs about this product.
用于 CMP 的小型研发规模专业系统
布鲁克的TriboLab CMP工艺和材料表征系统是专为晶圆抛光工艺而设计，是具有可靠、灵活和高效的台式设备。
- 重现全尺寸晶圆抛光工艺条件，无需在生产设备上停机
- 提供无与伦比的测量可重复性和细节检测
- 允许在小样品上进行测试，比全晶圆测试节省大量成本
板载诊断系统可以更好地了解抛光过程
- 提供更多的瞬态抛光过程的参数
- 从接触抛光盘开始直至整个测试过程都能收集数据
- 通过更完整、更详细的数据实现早期流程开发决策
具有灵活的样品类型、尺寸和安装配置
- 抛光大多数平面材料，能使用各种修正盘，抛光液，和抛光垫
- 轻松使用 100 mm 以下的小尺寸晶圆
- 可同时安装多个样品，测试更灵活
Frequently Asked Questions
TriboLab CMP accommodates small coupons up to 100 mm (4”) wafers. Multiple wafer head and mounting options are available.
Wafer head and platen speeds for the TriboLab CMP system can range from 1 to 500 rpm. Polishing load ranges vary between 0.07 to 90 psi based on wafer size and head. Download the system brochure for a full list of specifications.
Yes. The system is designed for reliable, flexible, and cost-effective benchtop characterization that closely aligns with full-scale CMP conditions.
TriboLab CMP can use virtually any industry-standard pad, slurry, and conditioning disc. It also supports a programmable two-pump slurry and rinse delivery system.
Yes. The platform supports a wide range of materials. Bruker can advise on process parameters and connect you with partners for material-specific recipes when needed.
The system can record load, friction, temperature, acoustic emissions, speeds, and pressures from first contact to the end of the test.
More About Bruker's Mechanical Testing and Tribology Technology
TriboLab platforms support standard rotary, reciprocating, block-on-ring, four-ball, scratch, and indentation tests. Common methods include ASTM G99, G133, G77, D4172, and C1624. Equivalent ISO methods can typically be addressed through the same hardware and scripting.
The exact scope of the included installation and operator training depends on region and contract. Confirm details with your Bruker representative.
All TriboLab systems are modular. You can select drives, force and torque sensors, environmental chambers for temperature and humidity, liquid and electrochemical options, and advanced sensors to meet your application needs. If you are not sure which modules meet your needs, our experts can help.
Bruker provides applications consulting, troubleshooting, and best practice guidance, along with optional service plans for ongoing support, maintenance, and training.
Contact us to arrange a demonstration or submit samples for an evaluation tailored to your test geometry and materials.