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Electron Microscope Analyzers


Highly Elemental Sensitivity with Minimal Sample Prep

High-Speed Elemental X-ray Mapping even over Large Areas

Film Thickness Analysis



10 ppm
detection limit
Enabling trace element analysis due to the lower spectral background
4 mm/s
travel speed
The optional Rapid Stage enables high-speed mapping over large areas
1 nm - 40 µm
layer thickness range
Thin films starting from 1 nm up to multiple layer structures of 40 µm can be analyzed

Micro-XRF as a Complimentary Analytical Technique to EDS Analysis in the SEM

  • Micro-X-ray Fluorescence (Micro- XRF) spectroscopy analysis is a complementary non-destructive analytical technique to traditional Energy Dispersive Spectroscopy (EDS) analysis using a Scanning Electron Microscope (SEM). Such analyses are important for the characterization of the elemental composition within unknown samples ranging from large centimeter sized inhomogeneous specimens down to small micrometer particles.
  • X-ray excitation yields a much higher sensitivity for trace element detection (down to as low as 10 ppm for certain elements), an extended X-ray spectral range (up to 40 keV), as well as information from greater depth within the sample. 
  • Equipped with an X-ray tube in combination with a micro-focusing X-ray optic yields small spot sizes of 30 µm with high intensity throughput. 
  • A modular piezo-based stage, specially designed to mount on top of the existing SEM stage enables high-speed elemental X-ray mapping “on the fly” over large areas up to a speed of 4 mm/ sec. This enables the acquisition of X-ray mapping data over a sample size of 50 x 50 mm (or higher), incorporating light element spectral data as well as trace element and/ or higher energy X-ray data in a fast and user-friendly workflow. 
  • The larger depth of X-ray excitation allows the characterization of multilayer systems starting from 1 nm and ranging up to 40 µm, which is not possible with electron excitation.


Expand your SEM analytical capabilities with the Micro-XRF and Rapid Stage

  • Dual beam potential, both an e-beam and an X-ray beam, which offers new possibilities for the material characterization - Investigate samples simultaneously with both sources.
  • Using the same detector for simultaneous e-beam/ micro-XRF acquisition, incorporating light element spectral data as well as trace element and/ or higher energy X-ray data. 
  • Both XTrace and Rapid Stage are seamlessly integrated in the ESPRIT software.
  • Combined EDS and micro-XRF quantification results in a more complete sample characterization by combining the better light element sensitivity of electron excitation with the better trace element sensitivity of XRF.
  • Simultaneous mapping with micro-XRF and e-beam excitation, combining the advantages from both worlds. Exciting the light elements (carbon to sodium) using the e-beam and heavier elements by micro-XRF.
  • Separate peaks & extended spectral range enables the capability to see the high energy K- lines since they are less complex and less overlapped.
  • Minimum sample prep – no conductive sample surface and no extensive polishing required
  • Standardless and standard-based quantification.


Incorporating Light and Heavy Elements even at Low Concentration Levels at a µm Scale

Exotic Cu sample from El Tesoro mine in Chile.

Large Area Mapping of Mineralogical Samples

The new Rapid Stage is specifically designed for SEMs to enable large area mapping over millimeter (mm) to centimeter (cm) scales. This will eliminate potential SEM X-ray intensity variation artifacts associated with low magnification mapping and thus enhance elemental and mineralogical information in a timeous manor that was previously not possible.
Large area map of an exotic Cu deposit sample.

Elemental and Mineral distribution in Exotic-Cu Deposits

The ability to observe elemental changes within samples is important to understand geological processes and ore deposit genesis. The dual source system which incorporates a micro-XRF on a SEM enables elemental X-ray mapping over large areas, which shows major, minor and also trace elements on the ppm scale.
Sample from Karangahake gold mine in New Zealand.

Dual Source Applications for Exploration and Mining: Au-bearing Epithermal Samples

The combination of micro-XRF with SEM enables the potential to analyze samples at multiple scales, from centimeters (cm) to millimeters (mm) to micrometers (µm) and below within a solitary system. Thus, by adding the micro-XRF to an SEM you convert your SEM to a dual source system, meaning that there are 2 excitations sources, the e-beam and photon beam. Either source can be used individually, or simultaneously, to generate sample X-rays that will be measured using the same EDS detector.
Large area map of a diamond-bearing eclogite.

Mantle Petrology and the Source of Diamonds

We present a SEM-XRF element map of a mantle garnet-spinel peridotite from the diamond-bearing Newlands kimberlite (South Africa, Kaapvaal Craton). The intensity of the various elements indicates certain minerals that are present in the sample.
Large area maps of soil samples.

Identification of Contaminants and Toxins in Soils

Large Area Mapping (Hypermaps) using SEM-XRF can be performed on samples with topography. That is, minimal sample preparation is required and the sample can be analyzed directly without any degredation. This is particularly relevant in the analysis of soils, where any form of sample preparation, such as mounting and polishing or carbon coating, may alter the specimen.
CIGS structure

Thin Film Analysis with SEM micro-XRF

As X-rays may pass through matter, X-ray Fluorescence (XRF) allows the determination of layer thickness. Using micro-XRF on SEM, the layer analysis (thickness and composition) is rendered feasible with spatial resolution at the micrometer scale. Layer analysis is strongly based on quantification using atomic fundamental parameter (FP).


Rapid Stage

The Rapid Stage can be mounted on top of the SEM stage for fast mapping over large sample areas.