Contour Elite X Tip Tilt Head v1
Contour Elite X Banner Bv2

Contour Elite X 3D Optical Profiler

Production-ready metrology and high-fidelity imaging for industrial applications

The fully automated, large-sample Contour Elite X 3D Optical Profiler combines unmatched measurement capabilities with highest vertical resolution over the industry’s largest field of view and high-fidelity color or monochrome imaging. No other metrology system provides the non-contact accuracy, throughput, operator convenience, and imaging capabilities to address such a vast range of production metrology applications.

Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, the Contour Elite X offers the ultimate gauge-capable 3D optical profiling solution.


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Contour Elite X tool image v1
Contour Elite K

Robust, Production Gauge-Capable Reliability

In addition to the unmatched measurement and imaging capabilities of Bruker-exclusive interferometry technology, the Contour Elite X is equipped with a proprietary internal laser reference and custom-designed industrial cabinet for maximum stability and robustness.

The system’s automation-ready configuration includes everything necessary for almost any production environment, including an air table tabilizer kit for enhanced X, Y, Z wafer placement accuracy, optimization of PDU, EMO and vacuum systems for integration, and modified vacuum chucks for autoloader end-effector compatibility.

Contour Elite X tilting head and platform v1
Contour Elite X Stage v1

Streamlined Automation and Precision

This motorized X,Y stage equips Contour Elite X with 12-inch encoded movement in the X and Y directions. Sample positioning is made easy with the joystick and software interface controls. An integral part of the Contour Elite X system, this X-Y stage enables automated routines, from multiple-point data collection to stitching capability for large-area analyses. The system's 0.5 micron encoders ensure reliable, repeatable automation and sample positioning.



Accurate Metrology Plus High-Fidelity Imaging

Contour Elite X provides the best available lateral resolution in an industrial 3D optical microscope, giving it an enhanced capability to quantify edge variations even on the smallest structures. The system’s high-fidelity imaging reveals specific surface details that otherwise would be difficult or impossible to see and enables users to segment data based on color or grayscale information to rapidly select areas of interest and collect critical metrology data from these specific regions.

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Contour Elite Vision 64 Software v1

Analysis Solutions to Production Challenges

The Contour Elite X features Bruker’s award-winning Vision64 software and the industry’s most functional and streamlined graphical user interface for production operators. It provides intuitive access to easy-to-use tools to customize process workflow, automate mapping, and load measurement recipes, which enable rapid in-line analysis to improve manufacturing reliability. Vision64 provides the operator with an extensive library of pre-programmed filters and analyses for LEDs, solar cells, thick films, semiconductors, ophthalmic and medical devices, precision machining, MEMS, and tribology applications.