Surface Characterization of Semiconductors: An Overview, from Topography to Advanced Physical Properties
Discover the most impactful innovations in semiconductor research.
This presentation focuses on Bruker’s solutions for nanometer-scale surface characterization of semiconductor materials and devices and the common questions and challenges facing scientists in this field. See real-time demonstrations of Bruker technology and the latest and moste effective techniques available to semiconductor materials researchers.
Find out more about the technology featured in this webinar or our other solutions for surface characterization of semiconductor materials:
Discover The Latest in High-Performance Surface Metrology
This workshop highlights how Bruker’s high-performance metrology techniques can provide new impulses for your research and assist in the nanometer-scale surface characterization of semiconductor materials and devices.
Our automated metrology solutions enable the streamlining of nanomechanical property sampling, from nanoscale-to-microscale indentation to surface roughness measurement, chemical mechanical planarization (CMP), and etch-depth measurements on the most current technology nodes and wafers.
We demonstrate the capabilities of high-resolution, in-situ scanning probe microscopy (SPM) imaging, high-speed mechanical property mapping, and Optical (WLI) Profiling and Stylus Profiling to provide an in-depth explorationof material behavior at the nanoscale, ideal for R&D and the monitoring and improvement of manufacturing processes.
Program Overview
| On Demand Access | Session Length | Title | Speaker(s) |
|---|---|---|---|
| Watch Now | 35 Minutes | Semiconductor 3D Metrology Using Optical & Stylus Profiling | Dr. Samuel Lesko, Sr. Manager, Optical Metrology Applications & Dr. Mickael Febvre, Application Manager |
| Watch Now | 20 Minutes | CMP Tribology | Dr. Udo Volz, Application Scientist |
| Watch Now | 20 Minutes | Mechanical Characterization of Semiconductor Samples and Devices | Dr. Ude Hangen, Nanoindentation Application Manager |
| Watch Now | 35 Minutes | Highest Resolution 3D Metrology & Advanced Physical Property Characterization of Semiconductor Samples and Devices | Dr. Vishal Panchal, Application Scientist & Dr. Hartmut Stadler, Application Scientist |
Featured Products and Technology
Speakers
Peter Dewolf, Ph.D.
Worldwide Application Director, Bruker Nano Surfaces & Metrology
Samuel Lesko, Ph.D.
Dir. of Technology and Apps Development for Tribology, Stylus & Optical Profilers, Bruker
Mickael Febvre, Ph.D.
Application Manager, Bruker EMEA
Udo Volz, Ph.D., Applications Engineer, Bruker EMEA
Ude Hangen, Ph.D.
Applications Manager, Bruker EMEA
Vishal Panchal, Ph.D.
Sales Applications Scientist, Bruker EMEA
Hartmut Stadler, Ph.D.
Applications Engineer, Bruker Nano GmbH
