XFlash® FlatQUAD 2L: Annular EDS Detector
Taking Energy Dispersive X-ray Spectroscopy to New Limits
XFlash FlatQUAD 2L is a unique and industry-leading Energy Dispersive X-ray Spectroscopy (EDS) detector with an annular 4-channel design that maximizes signal collection to open up new application areas for EDS.
The latest design of the XFlash FlatQUAD detector includes an enlarged central aperture, to enable simultaneous BSE imaging, all without impacting our industry-leading output count rates of 4,000,000 cps.
XFlash® FlatQUAD 2L - Making Difficult EDS Easy
- Perform SEM EDS at ultra-high resolutions down to the nanometer scale.
- Quantify elemental compositions at high throughput.
- Overlay X-ray EDS signals with simultaneously acquired BSE images.
- Analyze the elements in delicate or charging samples.
- Accurately map the elemental composition of topographic samples.
- Perform TEM-like EDS using a SEM.
- Operate in low vacuum and high vacuum mode.
XFlash® FlatQUAD 2 is the detector at the heart of our QUANTAX FlatQUAD system for EDS.
A Unique Detector Design for Industry-Leading Performance
The unique and patented design of the XFlash FlatQUAD 2L detector delivers unparalleled performance for both quantitative and qualitative EDS analysis.
XFlash® FlatQUAD 2L is uniquely constructed, with four silicon drift detector (SDD) segments, of 100 mm2 total area, arranged annularly around a central aperture.
The detector is positioned between the SEM pole piece and the sample, with the central aperture allowing the primary electron beam to pass through unobstructed.
This configuration significantly increases the solid angle and consequently the X-ray collection efficiency when compared to conventional EDS detector geometries. Additionally, the aperture also enables the efficient collection of backscattered electrons using the SEM’s BSE detectors, allowing true parallel signal acquisition.
To ensure compatibility with many different SEM types, XFlash® FlatQUAD 2L can be precisely positioned in the X, Y and Z directions.
Schematic showing how the primary electron beam of the SEM passes through the opening in the center of the XFlash® FlatQUAD 2L.
The X-ray signal emitted from the sample (magenta) is collected by the four SDD segments surrounding this opening, maximizing the solid angle and collection efficiency, whilst backscattered electrons (blue) pass back through to the SEM pole piece for BSE imaging.
Efficient EDS Signal Collection with an Output Count Rate of 4,000,000 cps
The orthogonal positioning of the XFlash® FlatQUAD 2L detector results in the largest solid angle yet for X-ray collection in a SEM.
Solid angles of more than 1 sr and take-off angles of more than 60° are possible with XFlash® FlatQUAD 2L, depending on specific geometrical conditions, to deliver extremely high count rates.
Each of the four detector chips is equipped with its own signal processing channel. This allows input count rates (ICR) of more than 10,000,000 cps and a combined output count rate (OCR) of up to 4,000,000 cps to be reached for ultra-fast and ultra-sensitive EDS.
XFlash® FlatQUAD 2L has an excellent energy resolution of 127 eV at Mn Kα. Resolution classes of 129 eV and 133 eV are also available.
True Parallel BSE and EDS Imaging
The large central aperture of the XFlash® FlatQUAD 2L EDS detector facilitates the unobstructed transmission of backscattered electrons to retractable or in-lens BSE detectors.
As a result, high-resolution BSE imaging can be performed in parallel with EDS acquisition for the simultaneous acquisition of compositional (EDS) and chemical (BSE) information.
Specialized polymer detector windows of variable thickness enable the controlled separation and simultaneous utilization of BSE and X-ray signals, depending on application requirements. These windows are optimized to manage backscattered electron interaction while maintaining a high X-ray transmission efficiency.
Applications of XFlash® FlatQUAD 2L
The unique geometry of the XFlash® FlatQUAD 2L detector makes challenging EDS easy, opening up whole new application areas to EDS analysis.
- Nanostructured samples – Ultra-high resolution for the analysis of samples with nanoscale features, such as semiconductors and advanced coatings.
- Non-conductive samples – Low kV analysis of poorly charging samples including polymers, ceramics and pharmaceutical materials.
- Topographic and rough samples – Improved X-ray collection from uneven surfaces including particles, fibers and additively manufactured components.
- Beam sensitive samples – Elemental mapping of beam sensitive samples, such as biological specimens, at low beam currents.
- Electron transparent samples – Using STEM in SEM imaging.
Learn more about the wide range of EDS applications that are now possible when using XFlash® FlatQUAD 2L on the QUANTAX FlatQUAD page.
Register Now: Step Into The Future of SEM Elemental Analysis
In this launch webinar, discover XFlash® FlatQUAD™ 2L, the first EDS detector to uniquely combine industry-leading X-ray collection efficiency with the ability to perform parallel BSE imaging.
See how co-registered elemental and contrast information can be acquired simultaneously at lower electron doses enabling faster workflows and higher spatial resolutions, even with beam-sensitive samples.
Discover QUANTAX FlatQUAD
XFlash® FlatQUAD 2L is the detector at the core of our QUANTAX FlatQUAD analytical system.
QUANTAX FlatQUAD includes everything you need to perform ultra-signal-efficient SEM EDS, including an XFlash® FlatQUAD 2L detector, processing electronics and our comprehensive ESPRIT software suite.
