Soluciones de semiconductores

Equipos de proceso y soluciones de metrología para los procesos de fabricación de semiconductores de hoy día y del futuro

Soluciones de metrología para semiconductores

Bruker Semiconductor desarrolla, fabrica, comercializa y da asistencia a soluciones de metrología para películas delgadas que se basan en una tecnología de rayos X novedosa, rápida, sin contacto y no destructiva. Con la adquisición por parte de Bruker de Jordan Valley Semiconductors, un nombre sinónimo de servicio y asistencia al cliente mundial inigualables, el 75% de los veinticinco principales fabricantes de semiconductores del mundo confían en las herramientas de metrología de Bruker para aplicaciones front-end y back-end, incluyendo el desarrollo de sus películas finas de última generación. El compromiso de Bruker con la innovación y el liderazgo tecnológico impulsa el lanzamiento constante de nuevos avances en metrología y va cosechando numerosos premios y reconocimientos de la industria.

En aplicaciones que van desde la caracterización de materiales de películas delgadas hasta el análisis de sustratos de obleas y la detección de defectos, los sistemas de Bruker proporcionan análisis de simulación y ajuste. Los tipos de medición HRXRD, XRR, WA-XRD y XRDI son totalmente compatibles, lo que permite a los investigadores, ingenieros de producción y desarrolladores de procesos disponer de capacidades sin igual. Tanto si es usted un fabricante de semiconductores, una academia, un centro de I+D o una instalación de investigación de materiales industriales, Bruker tiene una solución específicamente diseñada para sus necesidades de metrología.

Automated-AFM

Automated AFM Metrology

Automated AFM metrology solutions reliably measure surface roughness, chemical mechanical planarization (CMP), and etch-depth features
Wafer being cleaned with crygenic CO2 process

Cryo Dry Cleaning

Cryogenic CO₂ Cleaning Systems remove contaminants and residues from wafers and electronic devices
SmartProber during measurement on silicon wafer

Current-In-Plane Tunneling (CIPT)

Current-In-Plane Tunneling is a very fast and cost effective method to characterize Magnetic Tunnel Junctions (MTJ’s).
Nanomechanical-Metrology-Tools-Teaser-BRUKER

Nanomechanical Metrology Tools

Automated metrology solutions deliver high-speed, high-resolution, highest-sensitivity mechanical property and/or interfacial adhesion measurements
photomask-repair

Photomask Repair

Precise, accurate photomask repair systems address the critical production issue of controlling pattern defects on high-end photomasks
Stylus Profilometers

Stylus Metrology

Surface roughness characterization, step height measurements, and film stress analyses
OVERVIEW-filmtek

Film Thickness and RI Semi Metrology

Specialized thin film metrology systems for wafer and CD metrology, designed to meet requirements not measurable with conventional equipment
Electronic-circuit-board-futuristic-server-code-teaser-STOCK

White Light Interferometry

Advanced WLI profilers provide robust metrology-based inspection for advanced packaging applications
TriboLab CMP Tribometer and Mechanical Tester

TriboLab CMP

R&D-scale process and material characterization system for wafer polishing processes
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X-Ray Defect Inspection

Bruker defect detection systems detect crystalline defects, such as cracks, slip, dislocations, and micropipes on single-crystal substrates
close-up-of-patterned-wafer-teaser

X-Ray Metrology for Compound Semi

Diverse x-ray metrology systems deliver high-quality QC monitoring and detailed R&D analysis of epi-layer films
Silicon-patterned-wafer-teaser

X-Ray Metrology for Silicon Semi

Non-destructive x-ray metrology solutions for thin-films identifying substrate defects and performing front end of line control of epi films and high-k dielectrics, as well as analyzing metal films and wafer-level packaging bumps

Support

How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.