Soluciones de semiconductores
Assess and Improve Semiconductor Manufacturing Processes
Bruker’s comprehensive suite of specialized technologies addresses the broadest range of metrology and process monitoring needs, from R&D to high-volume manufacturing process improvement. 75% of the world’s top 25 semiconductor manufacturers rely on Bruker instrumentation for their front-end and back-end applications. Our commitment to innovation also drives the advances that enable continual development of next-generation semiconductor devices.
Our dedicated semiconductor solutions include:
- Ellipsometry and Reflectometry — Thin film metrology systems for wafer and CD metrology to meet requirements not measurable with conventional equipment
- Automated X-ray Metrology — Systems for high-quality process monitoring, detailed R&D analysis of epilayer films, identification of substrate defects, front-end-of-line control of epi films and high-k dielectrics, and analysis of metal films and wafer-level packaging bumps
- Automated Atomic Force Microscopy — Systems to reliably measure surface roughness, chemical mechanical planarization (CMP), and etch-depth features
- Photomask Repair — Systems to address the critical production issue of controlling pattern defects on high-end photomasks
- Cryo Dry Cleaning — Cryogenic CO2 process equipment to remove contaminants and residues from wafers and electronic devices
- Surface Metrology — Topographic measurement and mechanical testing solutions for efficient process monitoring and control across the full range of applications
Soluciones de metrología para semiconductores
Bruker Semiconductor desarrolla, fabrica, comercializa y da asistencia a soluciones de metrología para películas delgadas que se basan en una tecnología de rayos X novedosa, rápida, sin contacto y no destructiva. Con la adquisición por parte de Bruker de Jordan Valley Semiconductors, un nombre sinónimo de servicio y asistencia al cliente mundial inigualables, el 75% de los veinticinco principales fabricantes de semiconductores del mundo confían en las herramientas de metrología de Bruker para aplicaciones front-end y back-end, incluyendo el desarrollo de sus películas finas de última generación. El compromiso de Bruker con la innovación y el liderazgo tecnológico impulsa el lanzamiento constante de nuevos avances en metrología y va cosechando numerosos premios y reconocimientos de la industria.
En aplicaciones que van desde la caracterización de materiales de películas delgadas hasta el análisis de sustratos de obleas y la detección de defectos, los sistemas de Bruker proporcionan análisis de simulación y ajuste. Los tipos de medición HRXRD, XRR, WA-XRD y XRDI son totalmente compatibles, lo que permite a los investigadores, ingenieros de producción y desarrolladores de procesos disponer de capacidades sin igual. Tanto si es usted un fabricante de semiconductores, una academia, un centro de I+D o una instalación de investigación de materiales industriales, Bruker tiene una solución específicamente diseñada para sus necesidades de metrología.
How Can We Help?
Service and Application Support to Optimize Tool Utilization
The decision to invest in high-performance metrology is based on more than instrument performance and price. Bruker is committed to keeping your tool running at the peak of up-time and productivity. We have a highly educated worldwide team of service and support personnel that takes great pride in first-time solution of issues. Our variety of service coverage programs can be customized to match your specific requirements, including optimization of tool performance, recipe writing, and in-person technical support visits.
Bruker tailors services to your needs:
- Priority technical support
- Advance replacement parts and assemblies stored in regional warehouses for rapid response times
- Application and training services