Nanoscale AFM-IR Spectroscopy and Imaging for Failure Analysis of Electronic Devices
Due to the systematic shrinking of the size of devices in the semiconductor industry, characterizing nanoscale surface contaminations in interconnects and circuitries has become a pivotal issue in test and failure analysis. Continuous development in process technology/engineering has led to the fabrication of semiconductor devices with sub-µm feature resolution, which in turn demands high-resolution analytical tools for proper characterization. This webinar explains how photothermal AFM-IR spectroscopy and imaging provides ideal solutions to chemically characterize the organic contaminants, nano-patterned metal/low-k dielectrics, and directed self-assembly of block copolymers used for advanced micro/nano-fabrications
Speakers
Dr. Anirban Roy
Senior Applications Scientist
Cassandra Phillips
Sales Applications Scientist
