Key Publications

Year	Tech	Tool	Description	Publisher
2014	HRXRD	JVX7300LSI	Optical properties of pseudomorphic Ge1−xSnx (x = 0 to 0.11) alloys on Ge(001)	AIP
2014	HRXRD	JVX7300LSI	Benefit of Combining Metrology Techniques for Thin SiGe Layers	ASMC
2014	HRXRD	JVX7300LSI	Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps	AIP
2012	XRDI	JVSensus - QCTT	Prediction of the propagation probability of individual cracks in brittle single crystal materials	AIP
2011	HRXRD - XRR	JVX7300LSI	Metrology of epitaxial thin-films by advanced HRXRD and XRR	Electro IQ
2011	HRXRD / XRR	JVX7300HR	A Novel X-ray Diffraction and Reflectivity Tool for Front-End of Line Metrology	FCMN2011
2010	HRXRD	QC3 / QCVelox	Production metrology of advanced LED structures using high-resolution X-ray diffraction	Solid State Technology
2008	HRXRD	QC3 / QCVelox	Mosaicity and stress effects on luminescence properties of GaN	Physica Status Solidi (a)
2007	HRXRD	QC3 / QCVelox	Effect of thickness on structural and electrical properties of GaN ﬁlms Grown on SiN-treated sapphire	Journal of Crystal Growth
2007	HRXRD	JVX7300LSI	Asymmetric Relaxation of SiGe in Patterned Si Line Structures	AIP Conf. Proc.
2007	HRXRD	JVX7300LSI - JV-DX	In-line characterization of HBT base layers by high-resolution X-ray diffraction	ECS Trans.
2007	HRXRD	JVX7300LSI - JV-DX	X-ray metrology tool for new device materials and structures	Fabtech Semiconductor
2007	XRR	JVX7300LSI - JV-DX	Ultra Low-κ Metrology Using X-Ray Reflectivity And Small-Angle X-Ray Scattering Techniques	AIP Conf. Proc.
2007	XRF	JVX6200F - JVX7300F-W	Under-bump Metallization (UBM) Control using X-ray Fluorescence (XRF)	AIP Conf. Proc.
2007	XRR	JVX7300RF-T	CMP Control of Multi-Layer Inter-Layer Dielectrics (ILD) using X-ray Reflectivity	AIP Conf. Proc.
2007	XRR	JVX7300LSI	Characterization of Surface Preparation for Epitaxial SiGe Process using X-ray Reflectivity	ECS Trans.
2006	XRR - XRF	JVX7300RF-T	Application of x-ray metrology in the characterization of metal gate thin films	J. Vac. Sci. Technol. B
2006	XRR - XRD	JVX7300LSI - JV-DX	Nucleation and growth study of atomic layer deposited HfO2 gate dielectrics resulting in improved scaling and electron mobility	J. Appl. Phys.
2006	HRXRD	JVX7300LSI - JV-DX	Selective Epitaxy of Si/SiGe to Improve pMOS Devices by Recessed Source/Drain and/or Buried SiGe Channels	ECS Trans.
2005	XRR		Combined XRR and RS Measurements of Nickel Silicide Films	AIP Conf. Proc.
2005	HRXRD - XRR		Accuracy and Repeatability of X-Ray Metrology	AIP Conf. Proc.
2005	HRXRD		Scans along arbitrary directions in Reciprocal space and the analysis of GaN ﬁlms on SiC	Journal of Physics D
2005	HRXRD		MBE Growth and Properties of GaAsSbN/GaAs Single Quantum Wells	MRS
2005	HRXRD		Annealing effects on the temperature dependence of photoluminescence Characteristics of GaAsSbN single-quantum wells	J. Appl. Phys.

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