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X-Ray Defect Inspection

JVX7300F-C

Automated total reflection X-ray fluorescence spectrometer

Latest in TXRF technology and tool innovation

JVX7300F-C Automated TXRF -X Ray Defect Inspection-BRUKER.png

Highlights

JVX7300F-C

Yield optimization is one of the most critical goals in semiconductor device fabrication. Trace metal contamination on the surface of silicon wafers is a major source of yield concern. Contamination control during the process is therefore essential. The JVX73000F-C is the Bruker TXRF spectrometer for full wafers and offers quick, non-destructive, in-line and completely automated trace metal measurements, enabling contamination control in device processing. The JVX7300F-C complies with SEMI standards, comes with the user-friendly FabTXRF software package and contains the latest developments in TXRF technology and tool innovation.

Zero mm
edge exclusion
Provides valuable information on trace metal levels in critical areas of the wafer
300, 200, 150 mm
wafer handling
Compliant with automated wafer handling and notch alignment
Fast, Non-Destructive, In-Line
and completely automated measurements
Allowing fab technicians to collect critical contamination measurement data required for quality control with customizable recipes

Eigenschaften

Features

Low Detection Limits

The JVX7300F-C offers a customizable platform with up to three monochromatic optical paths. The optimized LE channel offers an unrivalled sensitivity for the light elements Na, Mg and Al. The ME and HE channel ensure the lowest detection limits for transition and heavy elements. The JVX7300F-C is equipped with the latest generation Peltier-cooled silicon drift detectors, offering excellent energy resolution and lowest background for the best trace metal sensitivity from light to heavy elements.

High Throughput Mapping

Full wafer maps at high throughput give information on the quantity of the contaminants and their location on the wafer surface. This information is critical for troubleshooting trace metal excursions and monitoring of trace metal levels at every process step in the fab.

Zero Edge Exclusion

The JVX7300F-C offers mapping capability with zero mm edge exclusion. Wafer edge TXRF measurements give engineers valuable information on trace metal levels in a critical area of the wafer, which is prone to cross contamination through FOUPS and edge grippers. As chip processing edge exclusions decrease, detecting contamination at the wafer edge is critical.

  • Configurable for up to 3 sealed X-ray sources for low maintenance, low cost of ownership and high uptime
  • Full mapping at high throughput that gives spatial distribution of elemental contamination over the full wafer with 0 mm edge exclusion
  • 300, 200, 150 mm wafer compliant with automated wafer handling and notch alignment
  • SEMI-proven, user-friendly, robust Fabware tool software
  • Powerful deconvolution and fitting algorithms in FabTXRF analysis software
  • Configurable with 1 or 2 load ports
  • Optional SECS/GEM automation
  • ISO Class 2 cleanroom compliant, SEMI S2/S8 and CE compliant

 

Mehr Informationen

More Information

Contamination Monitoring with Total Reflection X-ray Fluorescence (TXRF)

The Challenge

Trace metal contamination is a continually growing concern for semiconductor device fabrication. Contamination is especially critical for advanced technology nodes. Trace metals at the surface affect semiconductor device performance and product yields in multiple ways. During high temperature processing steps, metals at the surface can diffuse into silicon substrates, act as recombination centers, and degrade minority carrier lifetimes. Metals at the surface can also adversely affect silicon oxidation rates and become incorporated in gate oxides and degrade oxide integrity. Surface measurement of trace metal contamination is thus a crucial step in device manufacturing.

The Solution

Total Reflection X-ray Fluorescence (TXRF) is standard monitoring metrology for in-line semiconductor surface trace metal analysis. The JVX7300F-C TXRF makes quick, non-destructive, in-line, and completely automated measurements. The tool allows fab technicians to collect critical contamination measurement data required for quality control with customizable recipes. Furthermore, the software allows for reanalysis of already acquired data.

How TXRF Works

In TXRF a beam of X-rays is directed at a glancing angle incident on the wafer surface. The glancing angle is chosen to allow total internal reflection of the incident X-ray to improve excitation from material only at the wafer surface. The incident X-ray beam energy is chosen to excite certain elements X-ray emissions from the surface contamination. The X-rays emitted from contamination species have characteristic energies that are element specific. This allows for quantification of the metal contamination. The X-ray fluorescence process is non-destructive to the wafer. The measured spot size is defined by the silicon drift detector size.

Support

Support

How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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